Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details. 60 1 42 95 49.5 110.6 19.8 66 37 19.2 M6 Glossary of Terms The value in < > is for the aluminum body.
U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6
Use a commercially available belt wrench etc. for mounting and removing clamp rings. 68 High Precision Filter for Liquids FGH Series Dimensions FGD FGE FGG FGA FGC FGH100/200 FGH300 FGF FGH FGH 2 x Rc 2 x Rc M6 M6 FQ1 FN EB ES Pull-out dimension Pull-out dimension Dimensions A B Element length Port size (Rc) Model 3/8, 1/2 235 FGH100 70 x L117 211 3/4, 1 240 364 3/8, 1/2 FGH200 70 x L246
FH FH 140 70 HOW 215 42 20 Hexagon socket head cap screw (M6 x 10) 4 pcs. Handling Precautions Mounting q The flat portion of the stainless steel cover functions as the contaminant adsorption surface.
779 456 560 10 4 480 11-LEFS25ll-500l 789 829 506 610 10 4 480 11-LEFS25ll-550l 839 879 556 660 12 5 600 11-LEFS25ll-600l 889 929 606 710 12 5 600 35 524 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS32 5H9 ( ) depth 5 +0.030 0 (122) LEF Encoder cable (7) Body mounting Note 1) reference plane 4 x M6
D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6
D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056
42.5 37.5 46.5 17 22 28 31 12 14 29 38 16 16 42.3 52.3 30 38 17 19 20 24 47 58.5 21 26 80 105 M10 x 1.5 9, 14 depth of counterbore 10 CS1 32 0 0.039 145 M12 x 1.75 11, 17.5 depth of counterbore 12.5 C76 C85 Rubber cushion: C76RBF Without magnet, Built-in magnet Bore Stroke B C95 CP95 NCM NCA D-X 20Data S + Stroke ZZ + Stroke (mm) AM 20 24 C 12 14 D 37.5 46.5 EE G 1/8 G 1/4 F 42.4 52.4 FF M6
.5 2-M6 Screw depth 11 L _ M_ 'e' _ ' -, _a __ ;a'_Carbon steel I Material Cast Iron Material : Gast iron ApPljCabl;~ clamp cy l~nder j I Part No. A Applicable clamp cylinder Part No.
CKZ-50A013 CKZ-50A014 CKZ-50A015 NAAMS code ACA221M ACA222M ACA223M 55.0 85.0 115.0 50 mm Offset-Machined 50 mm Offset-Machined A A B B C C 6H6 through +0.008 0 8F7 through +0.028 +0.013 D D E E F F 200.03 200.03 10 G G 10 300.025 300.025 300.025 300.025 9 through 11 through H H I I J J 250.05 250.05 45 45 M6 x 1.0 M6x 1.0 750.05 750.05 R25 R25 6.5 6.5 10 10 1 1 1 1 R25 R25 18 18 19 19 19
x 1 10.5 26.7 11 5 5.5 34 35 8.5 4 x M6 x 1 +0.030 0 ) depth 4 4H9 ( ) depth 4 4H9 ( Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 47 46 13 ) depth 2 4H9 ( J 10.5 8 +0.030 0 +0.030 0 ) depth 2 4H9 ( 16.5 14.5 Section AA 5 B D Mounting base side Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2 x M2 x 0.4 depth 3
Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6
NA H S + Stroke ZZ + Stroke (mm) 36 30 26 22 ND 20-0.033 0 AL MM NA FX GB 22 22 GA ZZ S P N F D A B1 NB 32-0.039 0 7 5.5 5.5 5 K I GC 34 31 31 27 H1 H FF 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 8 8 40 32 25 20 15 15 6 6 5 17 17 13 6 6 42.5 34.5 30 24 24 22 22 18 37.5 29 29 29 21 19.5 19.5 15.5 14 12 10 8 30.4 104 78 76 76 M6
-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6
thread) (6.4) 12 64 9.4 38.5 63 56.5 (63) 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1(-F) 03 04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) NC 33 4.5 2A 31 41 (2) (9) 115.1 2 x 5.2 (For mounting) 1/8 12(PA) port (Mounting groove for M6 thread) (6.4) 12 (63) 64 9.4 38.5 63
Housing assembly Body Caution M5 hexagon socket head cap screw q M6 special screw (Do not disassemble.) Caution M6 special screw (Do not disassemble.) M5 hexagon socket head cap screw w Fig.1 Caution 1. Before disassembling, be sure to shut off the pressure supply, and then release the residual pressure. 2. After assembly, confirm that there is no fluid leakage.
P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6
x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1 1/2-16 73 : M12 x 1.75 This chart represents all current 13 : 1/4-20 41 : 1
5 20: M5 X 0.8 X 6 25, 32: M6 X 1 X 6 40: M8 X 1.25 X 8 Chrome-molybdenum steel Nickel plated Hexagon socket head screw 20, 25: M5 X 0.8 X 6 32, 40: M6 X 1 X 8 Hexagon socket head set screw Nickel plated Chrome-molybdenum steel !6 Name plate !7 Special resin Cushion seal !8 Replacement Parts Bore size (mm)/Part No. Description No.
4 20: M5 x 0.8 x 6 25, 32: M6 x 1 x 6 40: M8 x 1.25 x 8 Nickel plated Carbon steel Hexagon socket head cap screw !5 20, 25: M5 x 0.8 x 6 32, 40: M6 x 1 x 8 Carbon steel Hexagon socket head set screw !6 Nickel plated !7 Plate Special resin !8 Cushion seal NBR !9 Piston seal Replacement Parts Resin @0 Wear ring NBR Bore size (mm) Kit no.