100

consumption 300 300 Air consumption 200 200 100 100 0 0 Supply pressure [MPa] Supply pressure [MPa] ZL6H (With valve) ZL6M (With valve) 100 90 80 70 60 50 40 30 20 10 0 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 0.2 0.3 0.4 0.5 0.6 800 800 Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum

NCA1

1 1/4 1-14 7 1/2 1 3 1/2 2 1/8 2 2 1/8 NCA1-CB1401 9.3 6 19/32 3.032 2 1/2 1 1/2 1 1/8-12 8 1/2 1 4 2 5/8 2 1/2 2 1/2 NCA1-CB1402 10.6 7 1/2 3.032 3 1 1/2 1 1/4-12 9 1/2 1 4 1/4 2 7/8 2 3/4 2 3/4 Note) Pivot Pin not included Rod Clevises Part No CB CD CE CH CW F L A KK ER NY-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Air Filter No.2 No.2 Mist Separator Series AM Cases that require air removed with moisture, dust or oil, though air is not dried Industrial machinery (metal seals of drivers) 1 mg/m3 (ANR) Series AM Auto Drain AD402 Humidity 100% 0.3 m Oil odor Mist

Series HAW Water Cooled Aftercooler 1

Outlet air temperature = 37 1.3 = 28.5C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution 1. Design the piping for coolant water and compressed air with a bore that is greater than the bore of the piping connections. 2.

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: H (High Precision Type), Body Size: 50, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: H (High Precision Type), Body Size: 30, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max Rotating Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 30, Max Rotating Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 10, Max Rotating Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: H (High Precision Type), Body Size: 50, Max Rotating Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max. Rotating Torque: J (Basic, LER50: 6.6)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max. Rotating Torque: K (High Torque, LER50: 10)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: H (High-precision Type), Body Size: 50, Max. Rotating Torque: K (High Torque, LER50: 10)

Protocol: EtherNet/IPâ„¢, Mounting: Screw Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max. Rotating Torque: Basic, LER50: 6.6, Rotation Angle: -

Protocol: EtherNet/IPâ„¢, Mounting: Screw Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max. Rotating Torque: High Torque, LER50: 10, Rotation Angle: -

Protocol: EtherNet/IPâ„¢, Mounting: Screw Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: High-precision Type, Body Size: 50, Max. Rotating Torque: High Torque, LER50: 10, Rotation Angle: -

Protocol: EtherNet/IPâ„¢, Mounting: Screw Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: High Precision Type, Body Size: 50, Max Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: -

Protocol: EtherNet/IPâ„¢, Mounting: Screw Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: -

Protocol: EtherNet/IPâ„¢, Mounting: Screw Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: High Precision Type, Body Size: 30, Max Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: -