Dedicated Controller

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

Compact and

min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] 50 80 80 80 20 20 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption Vacuum pressure [kPa] Vacuum pressure [kPa] 40 60 60 60 15 15 Suction flow rate 30 Air consumption Suction flow rate 40 40 40 10 10 20 20 20 20 5 5 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 0 0.1

Clean Air Module

min) 100 120 0.3 MPa 90 Set pressure 0.4 MPa 100 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 80 70 80 60 0.2 MPa 50 60 40 40 30 20 20 10 0.1 MPa 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) LLB4-1-P1R1VSF: High Flow Type (500 L/min) 500 600 Set pressure 0.4 MPa 0.3 MPa 500 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 400 400 300 0.2 MPa 300 200

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1001FM AS2001FM AS2051FM Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations 725 AS-FM Series Construction Component Parts No.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) D L Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

15

The bore size is 25, so the allowable load by thrust will be 20 kg. Work load is 5.5 kg < 20 kg. OK The load is restricted to 20 kg when the stroke is 600 mm and Z = 100 mm taken from Graph (5) z (Refer to page 1495). (2) Allowable load by stroke Work load is 5.5 kg < 20 kg.

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

modular-press-e

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

Modular F.R.L. Pressure Control Equipment

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

PFxx-OMS0001CN

160 g 240 g G 170 g 245 g +80 g +25 g +30 g -67No.PF-OMS0001CN-A 1()10024 551005009.5 221002003.8 2OUT 30()90% ON(OFF) 4 5 60()90% 7 8 9 M8 ZS-40-A AWG23 0.7 mm PVC 1.1 mm PVC 4 -68No.PF-OMS0001CN-A A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min PFMC7501(500 L/min) PFMC7102(1000 L/min) kPa kPa 200KPa

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

The theoretical output for extension is 1924N, from the theoretical output table on page 2. 20 Load mass m (kg) Load mass m (kg) 80 50 50 50 40 60 40 40 30 40 20 10 0 0 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) Selection Graphs to (Horizontal Mounting) Graph l: 100mm or less Graph l: 101 to 200mm Graph l: 201 to 300mm

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

-S Accessory Dimensions Single knuckle joint Clevis pin Knuckle pin MM ND hole H10 L L l t t l t t RR1 m m m m d Dd9 d Dd9 0.1 0.3 NX +0.2 0 A1 U1 L 7 12 Material: Pin and snap ring both SUS304 Material: SUS304 Material: Pin and snap ring both SUS304 Part no.

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 NZ L 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 36 41.6 +0.5 +0.3 +0.058 0 -0.3 -0.5 +0.058 0 44 50.6 +0.5 +0.3 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 Knuckle Pin (Also used as double clevis pin) Rod End Nut d d Dd9 C m m l L t t H B Material: Carbon

IDX-OM-O004C

IDF15E1-20 L PE N TB CM ILS FM OLR PTC OLR ILS PTC PTC CM PRS TB C11 C11 FM PRS P 6.4 2 6 3 7.A A 7.1 7.2 A (10) 7.3 7.4 IDF15E1-10/20-A m 3/min(ANR) 1) 50Hz 1.2 60Hz 1.3 10 1) ANR 65% 2) 7 1 8.C C 8 8.1 8.2 8.3 1) 2) 81 9.K K 9 9.1 ( ) 9.2 1.6MPa AD48-8-X2110 KQ2H10-02S 10 IDF15E1-10-K IDF15E1-20-K 1) IDF-S0086 N.O. () 1) IDF-S0002 1 9 1 10.L L 10 10.1

Air Cylinder NCM Series Stainless Steel Cylinders

NCmRO-OT NCI|RO-OS H3 ).250 | r-24 o.75 |.0010.621 r2s6;; 093t0.22 t0-32 uNFl0.8l L00 1 . 1 20.12 t10-32 UNF $-m 0.62 0.34 0.880.38 3.22 2.66 2.35 1.69 t.312tyt -24 003t025 O-32UNF .12 r25 1.47 0.2,1 llG32 UtlF 1A-20 0.s10.47 1.22 o.62 3.75 3.34 2-93 1.81 ).137 t%^-20 r.25 1.m).12510-38 | r. -20 UNC 't.75 1.93 0.25 t|l-20 LhrC x.-18 1 . 1 20.38 1.57 0.88 4 . 1 9 3.49 3,692.O0 slrc' Air Cvlinder

XM, XY

(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

NCQ8

L M9NL 197in (5 m) .

Angular Air Gripper Series MHC2/MHCA2/MHCM2

MHC2, MHCA2, MHCM2 F L F MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S Pressure 0.6MPa 4 4 2 Pressure 0.6MPa 0.5 Pressure 0.6MPa Gripping force N Gripping force N Gripping force N 3 3 0.4 0.5 0.5 1 2 2 0.3 0.4 0.4 0.2 1 1 0.3 0 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 2 Series MHC2/MHCA2/MHCM2 Confirmation of inertial moment of attachment Step

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.