Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-04 FH54 -06 FH54 -08 FH54 -10 FH54 -12 FH541-16 FH640-03 FH64 -04 FH64 -06 FH64 -08 FH64 -10 FH64 -12 FH641-16 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340 175 60 65 2.5 120 136 2 x M10 x 1.5 15 0 1 0 1 32 (1 1/4B) 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36

Intrinsically Safe Valve

" One-touch fitting (EA) 5 1 (P) 3 (EB) 5/16" One-touch fitting 53-SY7000 4-position dual 3 port valves (N.C.

JXCx-OMY0006

B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 A6 B6 (18) (6.3) 16 15 L (11) (30.7) -59No.

PFxx-OMY0005

to 31 Pressure measured value With sign: 16 bit 32 to 47 Temperature measured value With sign: 16 bit 48 to 63 Flow measured value With sign: 16 bit 64 to 79 Accumulated flow rate lower limit Without sign: 32 bit 80 to 95 Accumulated flow rate upper limit Without sign: 32 bit Bit offset 95 94 93 92 91 90 89 88 87 86 85 84 83 82 81 80 Item Accumulated flow rate upper limit (PD) Bit offset

OMR0031

A master PLC can communicate with up to 16 devices via the RS485 serial interface. (20) Configuration of Step Data The Step Data values can be configured.

High Vacuum L Type Valve

Valve specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal

High Vacuum L Type Valve

Valve specifications Model XLF-16-2 XLF-25-2 XLF-40-2 XLF-50-2 XLF-63-2 XLF-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material

VM

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" Flow rate (l/min (ANR)) OUT 1000 680 440 480 420 210 150 IN OUT IN High pressure Effective area (mm2) 15.2 10.4 6.7 7.3 6.4 3.2 2.3 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

OMR0032

Refer to section 16. Alarm Detection (P.91) for detailed content of the alarms. 81 - 14.6.

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1200 MY2C 16 Cam follower guide High precision guide Single axis MY2H 25 High precision guide Double axes MY2HT 40 Manufacturable max. stroke (mm) Made to order Bore (mm) Model Guide 1400 1600 1800 2000 Intermediate stroke (MY2C: Standard) MY2C 16 Cam follower guide (16: up to 3000) Long stroke High precision guide Single axis MY2H

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) 12 Series CG1Y Mounting bracket dimensions are the same as those of the low friction, double acting, single rod type of Series CG1Q.

Air Cylinder NCM Series Stainless Steel Cylinders

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.

CC

E101. 10-17-16

High Vacuum L Type Valve

Valve specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal

VFR

0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7] 0.32 [0.45] 5.0 [2.9] 21 0.29 5.6 19 [9.2] 0.35 [0.48] 5.4

Process Valve Series VNA

VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Description 3 Note 2) 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Bracket (With bolt and washer) B 4 Note 2) How to Order Pilot Solenoid Valves 5 24 VDC 7 Note 2) 6 Note 2) 12 VDC CE compliant VO307 Q 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only Other 9 Note 2) Note 1) Electrical entry: D or DZ only Note

AC Servo Motor Driver (Pulse input type)

Parameter list for each mode . 15 4.1 Parameters common to each mode . 16 4.2 Position control mode . 16 4.3 Speed control mode . 16 4.4 Torque control mode . 17 5.

5 Port Solenoid Valve Series SQ1000/2000

16 stations R S Set the maximum number of stations so that there are no more than 16 solenoids for 9 or more stations.

Fieldbus system EtherNet/IP TM compatible SI Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.