NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

o trtvzgzto "' J 9 4l|_\lb, 4l/_t_\lF FrpFr-*--lF, Base mounted type I Nvz33m N\a23340 FF ^.1T2-hn* ""rrr-h--w @ l / n r r n r \ 1 s @ 1 / t , , , 1 , \ t E E -FjFF--"lFt\Nzy2l Nvz3440 ".rnun n "^rriiTrnv t r E { / , l l , l t . \ t E \ r E l h t 1 , l , \ 1 r u . . . i F n : _ * w wz352o r.rvzgslT qTniin-Th^ qrzrti\-nv ?

LX Series Compact Electric Actuators

Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(g) R A B A A 29 28 27 26 25 24 23 22 21 20 No. 460.5 448 435.5 423 410.5 398 385.5 373 360.5 348 L dimension R P R P P 82.9 80.6 78.4 76.1 73.9 71.6 69.4 67.1 64.9 62.6 Weight (g) B SY7000 DIN rail dimensions and weight VZ1000-11-4SY3000 SY5000/7000 Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

SMC Pneumatic Clean Series

Bore size (mm) Cushion valve Width across flats (mm) Socket wrench JISB4648 Hexagon spanner wrench 1.5 20, 25, 32, 40 1.5 snap ring 21 Series CM2W 10-/1121-/22Double acting, Double rod cylinder/ 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 H7B 21 C D M 2 W L 40 150 H7B Nil Built-in magnet Number of auto switches 2 pcs. 1 pc.

VCL

Port size 2 x P B 2 x M Thread depth N Port size 2 x M Thread depth N L L K K Conduit terminal:T F (Q) 34 25 U R C G1/2 E B A H D (S) Port size 2 x P 2 x M Thread depth N L K (mm) Electrical entry P Port size 1/8 H K L A B C D E F M N Grommet: G Conduit: C Conduit terminal: T Model Q R Q R Q R S U 13.5 28 64 12.5 31 6.5 M4 27 14 12.8 4.5 22 59 44 50 99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

One-touch Fittings

tubing P Effective area [mm2] Min. port size Release button dimensions L A2 M P Q O N Applicable tubing O.D.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

41.2 1/8 NPTF P(SUP) port 46.5 L type plug connector (L) M type plug connector (M) (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 66 300 (Lead wire length) Indicator light 300 61 Indicator light 49 55.5 Cover diameter 1.5 Cross sectional area 0.23mm2 P R 1 3 P R 1 3 Dimenisons n : Stations (Max. 20 stations) Equation L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 16

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

MB

Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 MM DA MM DA 30 MM MM 30 AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 30 30 MM L W DA MM W A L H AL A H A T T MM H 6-6-40 40 Series MB Simple Special Change of Trunnion Bracket Mounting Position -XC14 2 An air cylinder on which the position for mounting the trunnion bracket can be moved from the standard mounting position

JXCx-OMY0004

If W-AREA1 >W-AREA2, the "Parameter ALM" alarm will be Basic parameter "Stroke (-)" W-AREA1 W-AREA1 "Stroke (+)" Basic parameter "Stroke (-)" W-AREA2 W-AREA2 activated. However if W-AREA1= W-AREA2 = 0, WAREA will be OFF and no alarm will be generated.

No more element replacement!

rate (l/min) Flow rate (l/min) Filtration Characteristics P Fluid: Potable water P Flow rate: 20 l/min P Liquid temperature: Room temperature P Test dust: AC course P Test method: Per SMC test method 5 m FN11lll-10-S005 FN41l2l-20-S005 20 m FN11lll-10-S020 FN41l2l-20-S020 100 100 80 80 Filtration efficiency (%) Filtration efficiency (%) 60 60 40 40 20 20 0 0 10 5 20 50 75 25 20 35 65 90

Low Friction Cylinders Series MQ

K 0.2 A + Stroke M E 25, 30, 40 2 x P H effective thread depth C Q Y F 2 x 4 x OB Depth of counterbore RB 2 x 4 x OA effective depth RA J I 4 x N through 0.2 D W E M K B + Stroke L 0.2 A + Stroke M E (mm) Bore size (mm) P Stroke range (mm) RB Note) H OA A B C D E F W I Y J K L M N OB Q RA TN TF 10 39.5 M3 x 0.5 M4 x 0.7 10 to 40 31.5 6 6 ( 5.8) 29 5.5 38 4 5 5 8 20 3.5 6.5 14.5 7 16 44

Thermoelectric Bath

Standard item Reference item [mg/L] 50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness [mg/L] 50 or less Calcium hardness (CaCO3) [mg/L] 30 or less Ionic state silica (SiO2) p p p p p p [mg/L] 0.3 or less Iron (Fe) [mg/L] 0.1 or less Copper (Cu) Should not be detected.

REC

Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x MVGQ 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G 259 237 211 168 0.3 Foot style : L L CC 0.6 0.5 199 183 162 129 0.5 W W W F RB Figure (1) 168 154 136 109 0.7 Load factor J 119 110 97 76 0.3 m 90 83 73 56 0.5 G D74 68 60 46 0.7 1) = 0.7 or less -X 20m Data 2) = 0.5 or less m 3) = 0.9

Non-contact Gripper

XT661-4A-(R, L) XT661-2A-(R, L) P depth PL Air supply port P depth PL Air supply port 45 45 45 P.C.D.

4-channel Flow Monitor ( compatible)

Y U8 0x02 (2) 3: 1Sor (OUT1 turns red at ON) 4: 2SoG (OUT2 turns green at ON) 5: 2Sor (OUT2 turns red at ON) Set the connection range of PF2A5. 0: 10 L 1: 50 L 2: 100 L 3: 200 L 4: 500 L rAnG (PF2A5, Selection of connection range) Y U8 0x00 1 R/W (0) Set the connection range of PF2W5. 0: 4 L 1: 16 L 2: 40 L 3: 100 L 4: 250 L rAnG (PF2W5, Selection of connection range) Y U8 0x00 2 R/W (0)

15

Table Displacement (Reference Value) L W 0.02 LEJS40 (L = 52.5 mm) LEJS63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

MHY2/MHW2

MHT2 MHY2 Transferring work MHW2 MRHQ Clamping work Auto switch INDEX Applicable auto switch Page Solid state switch DF9/F9 l W type Water resistant 2 color indication D-F9BA Type P.2.8-8 to 2.8-15 Solid state switch D-Y5/Y6 type D-Y7 type Water resistant 2 color indication D-Y7BA type P.2.8-16 to 2.8-23 2.8-3 Series MHY2/MHW2 How to Select the Applicable Model How to Select Procedure Confirm