2–4

IC circuit 5 V A76H A96V A96 Yes A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V No Relay, PLC 2-wire 24 V Yes Connector A73C A80C A79W F7NV F7PV F7BV J79C F7NWV IC circuit 5 V, 12 V No Grommet Diagnostic indication (2-color display) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F9NV F9PV F9BV M9N M9P M9B 5 V,

KT10

F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

thread) AQ AP Finger closing port Vacuum suction port AN Finger opening port 4 x AK through (Thread for mounting attachment) S J O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY (mm) H Q A J R B K S C L T D M E N F P G Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29

VXD21/22/23

PA IN PAX Solenoid coil PB Coil: Class B, Class H Rated voltage Model AC Standard Option 100 V, 200 V 48 V, 110 V, 220 V, 240 V Orifice size (mm) Model Port size 10 VXD2130 Rc 1 4, 3 8, 1 2 Rc 3 8, 1 2 Rc 3 4 DC 24 V 12 V 15 20 VXD214 VXD215 VXD226 VXD227 VXD238 VXD239 2 0 Standard Option 2 0 2 0 Rc 1 25 Material 2 0 32A 35 40A 40 2 0 Body Seal Brass/BC6, Stainless steel NBR, EPDM, FKM

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

CE

P-67.5 (YG)

CYP

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) C 5.4 8.6 A 8 12 B 9.5 14 E 4H9 6H9 ED 9.5 13 EK 4 6 F 12.5 25

Rotary Actuator NCRA1 Series Single Rack and Pinion

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

NCRAI seies

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

Digital Flow Switches

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

MRQB-OM0002

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators HB HT HC X N A H HA CB W K 2 x plug 2 x P HP (Piping port) 4 x J x E T 4 x counterbore dia.

IDX-OM-W014

P MC TDR MC TDR IDU6E-10-T AC100/100,110V (50/60Hz) L N 1 3 2 PE TB MC TDR ILS TDR MC OLR MC C01 CM PTC MC FM C11 PRS P TDR MC CM PTC PTC C01 FM PRS C02 OLR TB C11 ILS TDR MC IDU Series 13-5 13 3 IDX-OM-W014 14 V 14 V V IDU3E/4E/6E-23 14-1 1.1 2 2. 3.

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

•

< II"", ~ ~ _ _ _ _ ...J p",,~ . ~~ pIy G NOIGomna l 1 _ _ .J 1>0'., s.uPply GNO " rm,nal ~ ~ _ _ ~ ~ _~ ~ ~ J f>ooo;ef lluppty GNOIEllmonal ~ ~ _ Construction { Parts List Precautions Installation Use of Toxic, Corrosive, or Flammable Gas Pressure sensor and fitting matenal of this switch J)Apply wrench only to the metal hex section is SUS630 and SUS304.

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

ML1

6 M1L025-17B82076 C-7 P-6 M1L040-17B82078 C-9 P-8 4.7-10 Series ML1 Auto Switch Specifications Refer to p.5.3-2 for the details of auto switch.

3M/SMseries

In center position the flo/v P-A, B is as sholn. X X { l ) Series NVFSOO How To Order NVFs lPort size (P,A,B) OXT Y.NPIF O3T %NPTF o4T. _ IbNPIF Typ of I *2 positiqr/singlo solanoid 2 -e position/double eolgnoid l-3 posilion, dGd c6oter/doubl6 solonoid 4 -3 gooidofl extEugt centr/double solenoid 5 -A pEsilion, p.6sure crte./double solenoid oyeride 'Subbas type only.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4