MG 0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !
XAH7 (mm) XL T-slot dimensions Bore size (mm) 50 80 a 11 13.3 b 17.8 20.3 c 10 12 d 6 8 e 17.5 22.5 Section XX detail 8-RR depth RL Section XX WB Z QA WA QB Section XX 4-OA through 4-OB depth of counter bore OL 4-MM depth ML 4-NN depth NL Section XX Z WA L HA T-slot for hexagon bolt X 0.02 X 0.02 DA VB VA X X T H U PW DB PB GC XAH7 depth XL 2-P (plug) XAH7 depth XL Q J K GA GB S G FB 2-P
Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B
Shaft Type Variation/Without Key Groove Shaft Type: T, J, K Size Rotating angle CRQ2B CDRQ2B Specifications Shaft type Air (Non-lube) Fluid Single round shaft (T), Double shaft (J), Double round shaft (K) Applicable shaft type Refer to How to Order on page 11-8-2 for further information.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
across flats K M T 0 0.1 D E 2 x P (Rc, NPT, G) A + 2 stroke B + Stroke V H + Stroke Width across flats K M Q F Z Stroke 2 x P (Rc, NPT, G) M E J Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore
MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x
[Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric resistivity/conductivity sensor set] . 6-3 6.4.1
Unit AC10B to 60B Dimensions A AC10B, 20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (Option) J L Square embedded type pressure gauge (Option) Port size M Min. clearance for maintenance Regulator Air filter Drain D AC25B, 30B, 40B, 50B, 55B, 60B A Pressure gauge port size F P E K N Q G G B C IN OUT K Pressure gauge (Option) J L Square embedded type pressure
1 r t y !2 e !4 !5 !4 !5 !
MM Air release e D E BB FY Width across flats G Air release NA T FT NB l C 10 f SS + Q + l + Stroke S + Stroke K F MA B SS + Stroke A FX ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB NA NB P R S T FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 16 32 15 37 31 3/8 39 141 11 11 11 88 40 109 182 52 21.5 15 25 to 1400 1/3.5 stroke 40
Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread
Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread
C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR D C E GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11
(b) () () t t [Hz] [Hz] [Hz] [Hz] 3. 7.1.6 3 4.5Hz2250Hz [Pr. PB45 ] ()150ms (1) t t 7 12 7. (2) Pr. PB45 ] [Hz] [Pr.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
[Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-3 6.4.1 Optional Accessories
Speed 300 mm/s Dimensions Basic Type REA REA 25, 32, 40 Effective thread depth J L 0 -0.1 NN G 4-MM H G B 2Port size Direct Mount Type REAR Direct Mount Type REBR X D I Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL NB NB N N K W T F NA S + Stroke ZZ + Stroke F R (mm) MM x J B D F G H I K L N NA NB NN Model Port size Rc 1/8 REA25 REA32 REA40 46 27.8 13 8 20.5 34 10 70 M5 x 0.8