CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

, 11 P.12 to P.15 P.1, 2 P.3, 4 P.5 to 9 P.5 to 9 Adsorption is possible even on a slanted surface.

Modular/F.R.L. Units Series AC

Example) AC30-F03DE1-KSTV-136NR Body size Description Symbol 10 20 25 30 40 50 55 60 Metric thread (M5) Rc NPT G Nil Thread type N Note 1) F Note 2) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil C D a Without auto drain Float type auto drain (N.C.) Float type auto drain (N.O.)

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

VFR

A B P A B P A B P VFR3000 VFR4000 ARBF5050 VFR5000 1.0 MPa (1) 0.1 to 0.83 MPa (2) 0.05 to 0.83 MPa 5 to 60C (No freezing) (3) 1 8 0.16 0.46 0.72 0.83 5.5 5.1 12 11 M5 x 0.8 Rc 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 P A P B A EA B EB Effective area at supply side (mm 2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 =

New

1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port

Plug-in/Plug Lead: Single Unit

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

Vacuum Pad: Ball Joint Type

, 710 P.711, 712 P.713 to 717 P.713 to 717 P.718, 719 P.720 to 723 Buffer stroke Adsorption is possible even on a slanted surface.

EX120/121/122

1 End plate (Output side) P. 1678 SI unit Input block e Waterproof cap P. 1672 o Power cable with connector P. 1677 e Waterproof cap P. 1672 w Power cable with connector (for SI unit) P. 1672 !

Electric Actuators

Press MANUAL button ( ) once for sizing operation (speed, sizing amount are specified values) P P MOVE Test P P P Return to ORIG Compatible Compatible P Operation of the specified step data P P Test drive Compatible Compatible (Continuous operation) P Forced output Compatible ON/OFF of the output terminal can be tested.

VZ1000

Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted, single operating VZS How to Order Manifold

LJ1H

P N Ground ball screw Rolled ball screw Specifications Combinations other than the above cannot be manufactured.



External pilot port Without M5 x 0.8 thread: Internal pilot VVEXB-1 With M5 x 0.8 thread: Common external pilot VVEXB-2 P = 31 P(1) port: Rc 1/8, For 6 manifold stations or n-Rc 1 8 more, exhaust from the both sides.

CNG

P-86.5 (JT)

Cylinder with Lock Series CNG

J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M10 x

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

Applicable Auto Switch Model

Note 2) Refer to p.5.3-5 for lead wire length.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

10 71.5 59 68 Applicable cord O.D. 4 to 6.5 Pg.7 29 mPm 27 50.5 58 63 25 2-3.5 (mounting holes) Manual override (non-locking) 27 0.5 0.5 P R 13.7 2-M5 x 0.8 (ports P, R) 24 See grommet type for other dimensions.