Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: C4H (ø4 One-touch Fitting, Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø1/4" One-touch Fitting, Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø4 One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø6 One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter, Option 3: -

Thermo-chiller

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

Electric Actuator

LEHS Size Size Max. gripping force lb (N) Max. gripping sides (mm) Size Max. gripping force lb (N) Max. gripping force lb (N) Stroke/both Stroke/both Stroke/both Stroke/both Size sides (mm) sides (mm) sides (mm) force lb (N) Basic Compact Basic Compact Basic Compact 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 1.35 (6) 1.80 (8) 4 6 1.35 (6) 1.80 (8) 4 6 1.57 (7) 16 (32) 24 (48)

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Screw lightly the auto switch mounting screw (M5 x 0.8 x 16 L). 4. Set the whole body to the detecting position by sliding, tighten the mounting screw (M5 x 0.8 x 16 L) to secure the auto switch. (The tightening torque should be about 2 to 3 Nm.) 5. When changing the detecting position, carry out in the state of 3. Auto Switch Mounting Bracket Part No.

4/5 Port Solenoid Valve

+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both

V100

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

20.5 P=20.5 19.5 (A, B port) 1/4 7 7 Applicable tubing O.D.: 10, 3/8" 9.4 9.4 B B B B 28.9 28.9 A A A A + + + L1 Manual override L2 6 37 (External pilot port) M5 x 0.8 (Pitch) 19.1 P=20.5 23.5 + + 42 (For mounting) 4 x 4.5 (5.5) 72.9 9.9 29 3.1 21 31.4 41.9 B B B B EB P EA X 26 26.6 21 21 80.1 110.2 112.2 PE A A A A (P , EA, EB port) 1/4 + + + + M5 x 0.8 Output no.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

5-Port Solenoid Valve

D-sub connector : p. 46 D-sub connector : p. 49 Flat ribbon cable : p. 52 Terminal block box (Spring type) : p. 63 Terminal block box : p. 72 Lead wire : p. 82 Circular connector : p. 92 EX500 (128 points) : p. 102 EX500 (64 points) : p. 108 EX600 : pp. 120, 121 EX250 : p. 130 EX260 : p. 138 EX126 : p. 146 EX120 : p. 154 Panel fitting dimensions 60 16 115 4 x M5 Mounting hole

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Nil : : P R 20 20 stations A A S + + + + P, R port thread type R port A port size R P A port M5 x 0.8, C4 P port 1/8 Nil Rc M5 M5 x 0.8 P port F G A 1/8 1/8 C4 One-touch fitting for 4 N NPT R port N3 One-touch fitting for 5/32" A port M5 x 0.8, C4 1/8 T NPTF Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port. 667 Manifold specifications

SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

ZP

p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101