Water-cooledThermo-chiller

75 75 60 60 45 45 Outlet pressure [50 Hz] Return port pressure 30 30 15 15 Return port pressure 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 2.1 gpm (8 L/min)., the shutdown alarm activates and operation stops.

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

Prevents Micro-Bubbles

) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

IDX-OM-W011

2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE N L 1 2 TB 3 TB 3 TDR MC TDR MC TDR ILS TDR ILS MC MC OLR OLR MC MC CM MC

Rotary Gripper Series MRHQ

Unit: g (oz) D-F9N (V) D-F9BV D-F9PV D-F9NV D-F9B D-F9P D-F9N Type 6 (0.21) 7 (0.25) 7 (0.25) 6 (0.21) 7 (0.25) 7 (0.25) Lead wire length 0.5m DC (+) Brown [Red] 31 (1.09) 37 (1.31) 37 (1.31) 31 (1.31) 37 (1.31) 37 (1.31) Lead wire length 3m Main switch circuit Auto Switch Dimensions (mm) OUT Black [White] 1in = 25.4mm D-F9N, D-F9P, D-F9B DC () Blue [Black] D-F9P (V) DC (+) Brown [Red] Main

3

shaft Shaft support Y seal Cap seal Stainless steel 304 PPS PPS Function Details Stainless steel 304 10 11 12 PPS FKM FKM 6 Series PF3W Dimensions PF3W704/720/740/711/721 Integrated display Y 1.4 D A E J F 50 Connector pin number Example W 30 B V Pin no.

NCQ8

Note 4) Robot cable is available as standard for D-M9(V),D-M9W(V). Note 5) 1m(M): D-M9W only. Note 6) Lead wire tolerance CD-P12 24 VDC 50 mA CD-P11 100 VAC 25 mA 200 VAC 12.5 mA Part No.

Cylinder with lock

Operating Range The figure shows the mounting example for the D-M9(V)/ M9W(V)/ M9A(V)/ A9(V) Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9/ M9V D-M9W/ M9WV D-M9A/ M9AV 4 4.5 4.5 4.5 5 6 D-Y59/ Y69 D-Y7P/ Y7PV D-Y7W/ Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5/ J59 D-F5W/ J59W D-F5BA/ F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/ K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 Horizontal load 50% 1000 Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

125

VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC.

Fieldbus System

U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) 16 16 stations 02 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations A, B port size (Metric) A, B port size (Inch) Symbol A, B port P, E port Applicable series C3 3.2 One-touch fitting 8 One-touch fitting SV1000 C4 4 One-touch fitting C6 6 One-touch fitting C4 4 One-touch

Rotary Gripper Series MRHQ

"#$ " %# &'# D t D D t t c c e c e e u u u s s s d d d i i i Rotary Gripper g g g o o o n n n r r r P P P A A A 9 9 9 MRHQ 10/16/20/25 w w w 9 9 m 9 I m I 1 1 n 9 9 9 9 n 9 9 d u d u r u a a a r u 9 o 9 9 s o s F tr F ie tr ie r r r 1 1 1 Modular construction D r D r d d d e e e e v v s s o o i i n g n g n n n n a a H H n P n P g g r r Gripper section is unitized for simple replacement.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead 6: LEKFS25EB Lead 6: LEKFS25EB 25 15 Lead 12: LEKFS25EA Work load: W [kg] Work load: W [kg] 20 10 15 Lead 12: LEKFS25EA 10 Lead 20: LEKFS25EH 5 Lead 20: LEKFS25EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEKFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead 8: LEKFS32EB Lead 8: LEKFS32EB

JXCx-OMT0061CN

CC-Link 7B READY 7C7F CC-Link 95 - (4) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () () B B C C D D 1 E E 2 F F 0 1 F0 1 Sub Function 71 () F8 2 F0 2 F0 Address 3 F0 3 F0 Address(0) 4 F0 4 F0 DATA(H) 5 F0 5 F0 DATA(L) 6 F0 6 F0 7 70 1 7 F0 F8 2 8 70 3 8 F0 F8 4 9 F0 Sub Function 9

Microspeed Cylinder

10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

Compact Cylinder with Air Cushion and Lock Series RLQ

D-A79W 14 14 16 9.5 13 9.5 9.5 11.5 D-F7/F7V D-J79/J79C D-F7W/F7WV D-J79W D-F7BAL/F7BAVL D-F7NTL/F79F D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 5.5 5 5.5 7 6 6 6 6.5 D-A7/A7H D-A73C D-A80/A80H D-A80C 12 11 10 12 The operating ranges are provided as guidelines including hysteresis and are not guaranteed values (assuming approximately 30% variations).

HEC_W-E

-5-3 FIG. 5-4 DISPLAY -5-4 FIG. 5-5 RESERVOIR CAP -5-4 FIG. 6-1 COOLING CAPACITY OF HEC006 -6-3 FIG. 6-2 HEATING CAPACITY OF HEC006 -6-3 FIG. 6-3 PUMP CAPACITY OF HEC006 -6-4 FIG. 6-4 PRESSURE LOSS OF HEC006 -6-4 FIG. 6-5 COOLING CAPACITY OF HEC012 -6-5 FIG. 6-6 HEATING CAPACITY OF HEC012 -6-5 FIG. 6-7 PUMP CAPACITY OF HEC012 -6-6 FIG. 6-8 PRESSURE LOSS OF HEC012 -6-6 FIG. 9-1 ALARM INDICATION

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Coil voltage 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 13 Series VQZ How To Order Manifold Connector Kit Preferred Option Program How To Order: VQZ100 Base Mounted Manifold VV3QZ 1 5 08 N7T C Option Series None DIN rail mounting (DIN rail standard length) External pilot 1 VQZ100 D R Manifold type 5 Base mounted Kit C Connector Number