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Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Therefore, in performance of Test Operation (T) Positioning Operation (I) with the set-up software, actuators move distance per pulse is set per pulse unit of the encoder. Item Setting range Unit Description Set the command speed of the servo motor for execution of positioning Motorspeed 0 ~ Allowed Speed for each actuator r/min (Motor rotations/min).

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4 1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T

(5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T

-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y :DIN +-No.1 No.2 T

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: C (N.C. Float Type Auto Drain), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: CG (C + G), Attachment: T (T-Interface), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: NZ (N + Z)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: C (N.C. Float Type Auto Drain), Attachment: T (T-Interface), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: NZ (N + Z)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: G (Round Type Pressure Gauge w/Limit Indicator), Attachment: T (T-Interface), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: G (Round Type Pressure Gauge w/Limit Indicator), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: Standard, Attachment: T (T-Interface), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: Standard, Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 25, Thread: Rc, Port Size: 02 (1/4), Option: G (Round Type Pressure Gauge w/Limit Indicator), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 25, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: DG (D + G), Attachment: T (T-Interface), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: D (N.O. Float Type Auto Drain), Attachment: T (T-Interface), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: Rc, Port Size: 02 (1/4), Option: D (N.O. Float Type Auto Drain), Attachment: T (T-Interface), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: DG (D + G), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: D (N.O. Float Type Auto Drain), Attachment: T (T-Interface), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)