Lightweight and Compact

Particle Filter Set Parts List HRS PF005 H No.

HRS100/150

Conversion factor: kcal/h to kW : 860 [(cal/h)/W] HRSE * Refer to the following for the typical physical property values by circulating fluid.

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42 53 35 8-8-14 14 Precision Air Slide Table Series MXP Dimensions: MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 MX 7 4 H 2.3 11.2 3 MTS 1 MY 1 0.05 D B 9.5 3.5 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H K VCKL1209-02F H KFS-12 N Gasket VCKK-4-1 Nylon 1 10 set unit 23 Troubleshooting (Valve

JXCx-OMY0004

Input [Position] 50.00 [mm]. 0mm/s 5000[0.01mm]=(01388)h Byte8: Position (HH)= (00) h Byte9: Position (HL)= (00) h Byte10: Position (LH)= (13) h Byte11: Position (LL)= (88) h (5) Input the numerical operation data input flag bit and numerical operation data, and then, input Byte4,bit0:Start flag= ON.

Table of Contents

5 to 16 Kit T NKE Corp.: Uni-wire System (16 output points) NKE Corp.: Uni-wire H System Note 1) Besides the above, F and P kits with different number of pins are available.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

IDX-OM-W034

(273 m 3/h) (384 m 3/h) (510 m 3/h) Air FlowRate (ANR)(Note 1) 120SCFM 173SCFM 258SCFM 353SCFM At Expected Outlet Press.Dew Point of 45 oF (7.2 oC) (205 m 3/h) (294 m 3/h) (438 m 3/h) (600 m 3/h) 130SCFM 181SCFM 297SCFM 406SCFM At Expected Outlet Press.Dew Point of 50 oF (10 oC) (221 m 3/h) (308 m 3/h) (504 m 3/h) (690 m 3/h) Operating Pressure 100psig (0.7MPa) Condition Rated Inlet Air

IDX-OM-W035

3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36-104F (2~40) 85% (4) AC115V10% AC230V10% (60Hz) AC460V10% (60Hz) (60Hz

7.5

Material Note Component Parts SJ3260K with back pressure check valve 1 Spool valve assembly Resin/H-NBR 3 position solenoid valve: Aluminum/H-NBR o t r e w y q !1 u !

Hydraulic Filters

pressure indicator (CB-H) Differential pressure indication switch (CB-H) Blanking cap Paper 5, 10, 20 (Micromesh) Max. 3.5, 7, 14, 21 MPa Line Filter FH34/44/54/64 Series 3/8, 1/2, 3/4, 1, 1 1/4 1 1/2, 2, 2 1/2, 3 510 Differential pressure indicator (CB-H) Differential pressure indication switch (CB-H) Blanking cap Paper 5, 10, 20 Micromesh 5, 10, 20 Vertical Return Filter FHBA Series Max

Thermo-chiller/Rack Mount Type

to kW : (= r x qv x 60) [kgf/h] : 1 [kgf/L] : 10 [L/min] : 1.0 x 103 [cal/(kgfC)] : 20 [C] : 22 [C] : 2.0 [C] (= T2 T1) : 60 [min/h] : 860 [(cal/h)/W] *1 Refer to page 40 for the typical physical property value of tap water or other circulating fluids.

reduces flow setting time

method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-23 (S) 3.2 7.2 13 (13) AS221FS-01-04 (S) 4 8.2 AS221FS-01-06 (S) 6 10.4 14

•

-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."g',,'-___ : ','(); Pin:t12"",: g= WL idth across fl~tsl 4.7 ./ ClevIS wld!h CK 1A :1 6.s=+P 40 80+ Stroke ZZ+ StJoke 2 CK1B : 195!

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

ML1C

MLGP Stroke adjustment unit mounting diagram ML1C ML1C Stroke Adjustment Unit Symbol Stroke adjustment unit Intermediate fixing spacer Right side stroke adjustment unit H: With high load shock absorber + Adjustment bolt Without unit With short spacer With long spacer Spacer length SH7 SH6 SH Without unit Nil Left side stroke adjustment unit Left side Right side HH7 HH6 H HS H: With high load

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 T D1 H D2 D3 L1 L2 Max. Min.

ZSE1/ISE1

H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1

SMC Electronic Switch Series Variations

Vacuum L = Effective area H = Fixed hysteresis (3digits) H H L P2(n2) P2(n2) H H L P1(n1) P1(n1) 0 0 Time ON 0 0 Normal mode Time ON Output OFF Normal mode Output Time OFF ON Reversed mode Time Output ON Reversed mode OFF Output Time OFF Time Peak display mode 7 PZ/ISE3, Z/ISE4, 4B, 4E, Z/ISE5B, 6B PPSE100 High High Peak mode high High High Peak mode high High Pressure Vacuum Pressure Vacuum