Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 :

Rotary Table

When the rotational axis and load center of Rectangular parallelepiped) Position of rotational axis: Perpendicular to the plate through the center of gravity gravity are not consistent L 2 r I = K + mL K: Moment of inertia around a b the load center of gravity 2 2 b a + 2 r I = m 12 4.Round plate K = m2 9. Gear transmission 4.

Compact End Lock Cylinder Series CBQ2

With front lock Bore size (mm) L L1 A A FV M 80.5 73 7 28.5 32 90 79.5 7 28.5 40 4-FD FT L 92.5 82.5 8 33.5 50 B + Stroke A + Stroke FZ FX 94 88 8 33.5 63 Rod end male threads Dimensions other than A, L and L1 are the same as the front flange type.

NVEPA|VEFseies

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

0.4

consumption (W) Max. operating frequency (Hz) A 80 1200 B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws (M3 x 0.5) and a gasket are included.

High Vacuum L Type Valve

nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76

IDX-OM-W093

8 A 8.1 8.2 A (10) 8.3 8.4 IDF60-20-A IDF60-30-A IDF70-20-A IDF70-30-A IDF80-20-A IDF80-30-A IDF90-20-A IDF90-30-A 50Hz 2.3 4 5.8 7.1 3/min(ANR) m 60Hz 3.2 4.8 6.5 7.9 10 1) ANR 65% 2) IDF60/70/80/90 Series 8-1 IDX-OM-W093 A 8.5 IDF60/70/80/90 Series 8-2 IDX-OM-W093 C 9 C 9.1 9.2 1) 2) IDF60/70/80/90 Series 9-1 IDX-OM-W093 A IDF60/70/80/90 Series 9-2 IDX-OM-W093 L 10 L L

Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

LEKF-OMZ0035

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Direct Solenoid

..p s y. itrdu.r* 6p,{r) res$dtsLdi.O oF .td d 16, (1) indaaiorrigtrtGdrbry.b r 7 a 1 8, (1) d.t 19, (21 dsi 13, l2l (H 121. and O )dol7 {valw tvDe'F1 1 3 2 1 5 AXT333-16 1 5 1 1 1 a E K l9 I oao) 4.aa t122) 3.25 (43) 136) L0a (23) en 1.09 (23) 06j 1.63 0) 136) axl3i,t12-2 2 Hold ddn bolls r'd bd(waBlm I&s2 !

Parallel Type Air Gripper

Use a specified grease. Specified grease pack part number: GR-S-010(10g) Cap Type C retaining ring Hexagon wrench size Guide Nominal Guide bolt 32 3 Hexagon wrench 40 4 Hexagon wrench size Lever shaft Nominal 32 2 Hexagon wrench 40 2.5 Hexagon socket head set screw Lever Use a resin bar not to scratch the sliding part. Seal Piston assembly 17 - 3-5.

MRQB-OM0002

L 5 4.4 [mm] L M 32 40 9 M6 4.3 16 4-3. A 4.4 4.4 5 B C E A D F 4.5 32 5.7 40 4.8 4-4. 4.5 4.6 (POSI LOCK) ISEL(MECHALOCK) NBK(Clamp Lock) 32 PSL-K-12 MA-12-26 CLH-1218 40 PSL-K-14 MA-14-28 CLH-1423 17 4-5. 4.6 4-6. 4.74.7 2 4.7 32 Rc1/8 Rc1/8 M50.8 40 Rc1/8 Rc1/8 M50.8 4.7 , A) , , , B) , ,1.52 18 5. 5. 5. 5. ,, 5-1.

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

PFA/PFW

Never mount a switch in a place that will be used as a scaffold during piping work. Damage may occur if subjected to an excessive load. Especially when the switch supports piping, do not apply a load of 15Nm or more to the metal part of the switch. 11. Provide a section of straight pipe of at least 8 times the pipe diameter in the piping before and after a switch.

PF2D

OUT2 NC Sensor 8 Load 40 41.8 4.3 40.3 4 OUT1 Black Main circuit Main circuit 7 3 Load Brown + 6 2 SMC FLOW SWITCH Blue 5 1 35.8 36 A 40 12 to 24 VDC Series PF2D5 UNIT RESET PF2D300-A(-M) SET Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Panel fitting dimension

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. Each product is not assembled.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40