3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

The proper tightening torque for screws 0.3 to 0.4 Nm Rated voltage With indicator light VZ Voltage symbol Part no. 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 VS (b) VFN Valve Mounting Circuit with Indicator Light After confirming the gasket is correctly placed under the

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

VCC

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

CNG

32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300

IIIIIIIIII

PSI -8 to 5 PSI -8 to 20 PSI -13 to 20 PSI 0 to 10 PSI 0 to 20 PSI, 3:1 RATIO 0 to 20 PSI, 5:1 RATIO XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX BARB OPTIONS ADJUSTING OPTION W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH SHAFT P80 = 1/16" ID BARBS P85 = 1/8" ID BARBS NOTE: UNITS COME STANDARD WITH STRAIGHT CONNECTIONS FOR 1/16" ID TUBING Back to Top .

MK

Symbol A 11.5 12 B 4.5 4 W 19.5 21.5 W 5.5 6 A 11.5 12 B 4.5 4 A 7.5 8 B 0 0 Hs 17 19 W 1.5(4) 2(4.5) A 7.5 8 B 0 0 12 16 Bore size (mm) D-F9BAL Model Symbol Bore size (mm) A 10.5 11 B 3.5 3 W 14.5 15 Hs 17 19 12 16 4.1-13 Rotary Clamp Cylinder/Heavy Duty Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S A73 20 10 R F Number of auto switches Rotary clamp cylinder S 2 1 Mounting Style

3

(mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-M9AV D-A9V D-M9V D-M9WV D-M9AV CK CLK D-M9A D-A9 D-A9V Bore size (mm) D-M9V D-M9WV CKQ Hs Hs Bore size A B W A B W A B W A B W 4.5 (2) 12 16 19 21 17 19 12 12 4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

Vacuum Pad

to 50) PTSF-(A5/AG1/A12/AG2/AG3) ZP3P-T (20 to 50) PTSF-(B5/B8) w T male thread adapter assembly (With gasket) p.3 p.3 Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-A5 V V ZP3PA-T1-AG1 V V ZP3PA-T2-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T female thread adapter

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(Values at the initial period) Flow Characteristics/Weight Response time (ms) (1) 2 3 (A R) 1 2 (P A) Flow characteristics Series Valve construction Weight (2) Standard type: 1 W AC High pressure type: 1.0 W Low wattage type: 0.5 W Model (g) Cv Cv b C [dm3/(sbar)] b C [dm3/(sbar)] VQZ100 0.25 VQZ115 0.35 0.46 1.0 0.23 0.87 13 or less 10 or less 22 or less Poppet N.C. valve 25 0.45 VQZ215

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 20 16 20 16 20 Mounting position Mounting position 16 A 90 70 93 73 94 A A 74 B 110 90 107 87 106 B B 86 Operating range Note) 7.5 11 6.5 8.5 6.5 Operating range

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Air Combination

With barb With drain With drain With drain With drain With drain fitting guide cock guide cock guide H J H J H J H J H J B B B B B B B AC20-D 28 27 27.8 37.5 37.5 57.5 37.5 58.5 37.5 58.5 104.9 91.4 87.4 93.9 AC30-D 28 32.5 27.8 43 37.5 63 37.5 64 37.5 64 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AC40-D 28 41.5 27.8 52 42.5 73 42.5 73 42.5 73 186.9 155.6 153.9 149.5 154 169.5 174 AC40-06

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

EXxx-OMZ0016

Problem 3 Red ON OFF Red Flashing W-SS W-SS LED flashes red or orange or is off Problem 4 Orange Flashing OFF Green Flashing Red Flashing Red ON W-NS W-NS LED does not turn on green. Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

Card Motor

time Tmin [ms] Shortest positioning time Tmin [ms] 6 86 350 W = 300 W = 400 W = 500 LAT3m-10 120 250 W = 400 W = 500 300 100 5 LAT3m-20 Frequency [cpm] Frequency [cpm] Allowable thrust setting value 150 200 120 250 W = 300 LAT3m-30 4 200 150 200 150 W = 0 W = 100 W = 200 200 150 300 100 W = 0 W = 100 W = 200 3 300 100 600 50 600 50 2 0 0 0 5 10 15 20 25 30 Stroke(Positioning distance) St

24

Contents 20 MGP20-B-PS Set of nos. above @4, @5, @6, @7, #5, $4, $5 50 MGP50-B-PS Set of nos. @4, @5, @6, @7, above #5, #6, $4, $5 63 MGP63-B-PS 80 MGP80-B-PS Set of nos. @4, @5, @6, @7, above $4, $5 100 MGP100-B-PS 25 MGP25-B-PS 32 MGP32-B-PS 40 MGP40-B-PS *: Each seal kit includes the parts listed above.

JXCx-OMY0004

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 8 8m COM-A/COM B-3 Green 3 COM-B/ A-3 A 10m Blue 4 (3) Shield B 15m Cable color Terminal No. Vcc B-4 Brown 12 C 20m GND A-4 Black 13 Produced upon receipt of order A B-5 Red 7 A A-5 Black 6 Only "Robotic type cable" can be selected. B B-6 Orange 9 B A-6 Black 8 3 (4) Signal name Terminal No.

PFxx-OMX0007

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".