Suction cups with flange

4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

Air Fittings Fitting Series For Special Environment

N L1 L2 Port B min. port size L3 L4 L5 L6 D P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 80 10 6 6 10 40 47 23.3 13 19.5 33.5 23.5 33 13.5 19 22 8.5 10 106 6 89 10 120 55 73 53 55 KRM11-08-12-10 KRM11-08-12-6 8 12 25.7 15.5 22.5 37.5 26 36.5 20.5 24 10 11.5 14.7 86 74 KRM12 Weight (g) Applicable tube O.D.(mm) Thread Rc(PT) H (Hex.) Port B min. port size Part No.

Digital Gap Checker

Smallest settable increment 1 0.01 0.1 5 C O N T E N T S ISA3 Series 3-Color Display Digital Gap Checker ISA3 Series How to Order (Without Control Unit)Page 7 How to Order (With Control Unit) Page 8 SpecificationsPage 9 Supply Pressure Dependence CharacteristicsPage 10 Response TimePage 11 Relationship between Displayed Value and DistancePage 12 Nozzle ShapePage 12 Internal Circuit and Wiring

Low Maintenance Filter Series FN1

Filter plate 2 Series FN1 Flow Characteristics (Initial Value) Test fluid: Potable water Liquid temperature: 17 to 20C (room temperature) Test method: Per P/A test method (sanitary test stand) Element length 250mm: FN111-10-S Element length 500mm: FN112-10-S .1 .1 .05 .05 FN111-10-S005 (5m) Pressure loss (MPa) Pressure loss (MPa) FN112-10-S005 (5m) FN111-10-S020 (20m) .01 .01 FN112-10-S020

CLA

lor 9~re lock- tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

3 Way,3 Port Solenoid Valve NVZ Series

The extemal pilot pressure is separate from the main supply pressure. wnh indicatq rightioc) Applications a Vacuum or low pressure (less than 10 PSI). Howewi this valve will not retain vacuum indefinitely a In case ot A port used in an open position. For example, air blorring. a In case ot P port extremely restricted.

NVZseies

The extemal pilot pressure is separate from the main supply pressure. wnh indicatq rightioc) Applications a Vacuum or low pressure (less than 10 PSI). Howewi this valve will not retain vacuum indefinitely a In case ot A port used in an open position. For example, air blorring. a In case ot P port extremely restricted.

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Clean Air Module

The switches do not have an explosion proof rating. Never use in the presence of an explosive gas as this may cause a serious explosion. 2. Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

10

Magnet is built-in, but when using an auto switch, the acceptable temperature range becomes 10 to 60 C. For lubrication, specialized grease GR-F is recommended. How to Order Standard model no.

CC

It converts air pressure to an equivalent hydraulic pressure, and this hydraulic pressure is used for operating an actuator, thus solving the problem that is associated with the compression characteristics of air.

Series KV2 Fittings

Part Number T (UNF) H1 (Hex) H2 (Hex) Thread NPT Wt.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60