Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1 02 03 Port thread Nil T F Rc NPTF G Size 1 2 3 Size 1 Size 2 Size 3 Location of P, EA, EB port Number of stations D U Bottom Top 1 1 station 10 10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom 3/8 Bottom 1/2 Option
. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)
. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)
Displays nothing Analog output free range function This function allows a flow that generates an output of 5 V (or 10 V when 0 to 10 V is selected) or 20 mA to be changed. The value can be changed between 10% of the maximum value of the rated flow and the maximum value of the display range.
10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.
1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 45 The body mounting reference plane should be used as a standard when mounting onto equipment.
T L2 ASR ASQ Metric Size Inch Size A Model A Weight (g) Weight (g) d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 M1 AS131F-M5-23D AS131F-U10/32-01D 1/8" 8.4 3.2 8.4 19.8 19.8 17.5 12.7 17.5 12.7 28.7 10 28.7 AS131F-M5-04D AS131F-U10/32-03D 5/32" 9.3 20.3 M5 x 0.8 8 9.6 9.3 4.7 10.8 0.7 27.4 4 9.3 20.3 10 31 0.7 37.4 4.7 10.8 10-32 UNF 8 9.6 9.3 31 AS131F-M5
75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4
0 w q t e u Cover 2 Aluminum alloy Fitting body 3 Stainless steel alloy Bracket 4 Stainless steel alloy O-ring A 5 H-NBR O-ring B 6 H-NBR Rod cover 7 Stainless steel alloy Tie-rod 8 Stainless steel alloy Cap nut 9 Stainless steel alloy Plain washer 10 Stainless steel alloy Replacement Parts r y o No.
Can be locked in both directions An equal holding force can be obtained on either reciprocating stroke of the cylinder. Compact lock unit is light weight and saves space Overall length has been reduced by using an independent brake cylinder (15% compared to P/A products).
Part no. m t Snap ring D d9 3 d l D d9 3 L d l m t Snap ring L IY-P006 CT-P006 0.65 0.020 0.045 0.020 0.045 17.6 20.4 Clip type C3 Clip type C3 0.65 9 2.85 2.85 6 0.75 0.75 6.2 Data IY-P010 CT-P010 5 5 0.7 0.030 0.060 0.030 0.060 20.5 23.9 Type C 5 Type C 5 0.7 13.6 4.8 4.8 10 10 1 1 10.2 IY-P015 CT-P015 6 6 0.8 0.030 0.060 0.030 0.060 28.1 31.7 Type C 6 Type C 6 0.8 15.8 5.7 5.7 15 15 1
, 15, 20 5, 10, 15, 20, (25), 30 10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.
Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.
Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.
Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications
4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.
For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.