Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

Rotary Table

Shock absorber External shock absorber With adjustment bolt 0.007[J] 0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

MGP

10 PB 2-Rc 3/8 (plug) Q PA + Stroke 10 S FB FA C + Stroke B + Stroke E A + Stroke J JA JB K G Refer to "Manufacture of Intermediate Strokes" on page 19 for intermediate strokes.

MG

6H7 depth 10 PB GB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com WB J JA 10 Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FB FA S K E G With head end lock 7 6H7 HN 10 5 6H7 DM 23 b a Detailed figure of section XX T-slot dimensions e c d End

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W FY B D E d MA M a NB C F A K NA B S + Stroke FT H FX ZZ + Stroke FZ With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R D E 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 44 18 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14

HRX-OM-O021

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

Series IDG

IDG 10 M 03 X016 Optional specifications Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard 10 Flow direction (rightleft) With dew point indicator R S 20 Standard equipment 30 50 Drain discharge symbol Standard dew point Size 3 10 20 30 50 5 Drain discharge method Nil Manual valve C N.C. auto drain D N.O. auto drain Drain guide (aperture 1/4, without valve) J Port size Note) IDG50M

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Cylinder

58 63 1 68 J 73J 83 , 66 71 76 81 1 91 i 10 . . " ISore size A' ~i I D O'( A B e GA GB K MM CX E NN CK CU OC~ CH ' ,o j ' 1 Cr H I J (mni) .~ , ~ 6 7 9 14 16.5 3 1 0.5 11 M3 XO .S M10 X 1.0 6 17 , 6 18.5 20.4 3 16 4 12 1.6 18 3.4 8 26 ~-13 ( 10 10 20 5 M4XO.7 MlaXl.0 6.5 1.6 24 6 I 17 8 20,5 1 239 4.5 20 I 7 33 R l l~ . 5 L29 13.5. 12 24.5 6 15.5 6 18.5 M5 XO .8 M14 X 1.0 17 2.9 42 14 I

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

CM2

) Ambient and fluid temperature With auto switch: 10 to 60C (No freezing) Lubrication Not required (Non-lube) CJP Clevis integrated Thread tolerance JIS Class 2 CJ2 +1.4 0 mm Stroke length tolerance Piston speed 50 to 750 mm/s CM2 Cushion Rubber bumper Allowable kinetic energy 0.27 J 0.4 J 0.65 J 1.2 J JIS Symbol Double acting, Single rod CG1 Courtesy of Steven Engineering, Inc.-230 Ryan

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

C95Series

10 !