Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

Process Pump

30 40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

Coolant Valve

VCC 0.4 0.3 TQ 0.2 0.1 0 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Operating pressure (MPa) 619 A VNC Series Construction N.C. i i o o t t r w r w Port 12(P1) Port 10(P2) u u In the case of 32A to 50A y y N.C.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

From the menu bar, click Parameters(U)-Edit Parameters(U). The Parameter Editing window will be displayed. 2. If you click on each item, such as "Function selection(Pn0xx-)" will be displayed parameter list of each item.

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

5 Port Solenoid Valve SY Series

port Type 20 Bar stock type Individual wiring SY3 20 SY5 20 SY7 20 P. 37 Direct piping to the main unit of a valve.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For type R and U, DC voltage is only available. Power saving circuit is only available in the "Z" type.

air-filter-e

pressure proof 0.6 MPa 273 Low Maintenance Filter Series FN1/FN4 P.483 2 Replacement Procedure is Replacement Parts and Seal List FN111-10-S FN112-10-S FN4102-20-S i u y o i y o t OUT IN OUT IN OUT u IN DRAIN DRAIN DRAIN Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FN1/FN4.

Air Preparation Equipment

pressure proof 0.6 MPa 273 Low Maintenance Filter Series FN1/FN4 P.483 2 Replacement Procedure is Replacement Parts and Seal List FN111-10-S FN112-10-S FN4102-20-S i u y o i y o t OUT IN OUT IN OUT u IN DRAIN DRAIN DRAIN Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FN1/FN4.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For type R and U, DC voltage is only available. Power saving circuit is only available in the "Z" type.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(5/32) N7T (1/4) M5 (M5 thread) 2 stations: 68 Addition per 1 station: 20 1/8 NPTF Top VQZ2 2 VQZ200 2 to 20 stations VV3QZ22N7T (1/4) N9T 5/16) N11T (3/8) 1/4 NPTF 2 stations: 114 Addtion per 1 station: 37 1/4 NPTF Top VQZ3 2 VQZ300 2 to 20 stations VV3QZ32How to Order / Manifold Assembly (Example) D side U side 1 3 4 5 Stations 2 VQZ212-5M-N7T 4 pcs.

0.01

Set the air flow capacity with an initial pressure drop of 0.03 MPa or less. If the initial pressure drop is set to be high, its service life will be shorten due to clogging. 5. Determine the product by the maximum consumption flow rate.

Electro-Pneumatic Valve NVEP/NVEF Series

Twisting the wire of the AC line is an effective counter measure against noise. Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

NVEPA|VEFseies

Twisting the wire of the AC line is an effective counter measure against noise. Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 q u r !0 !1 e !4 !3 w !0 !

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

HNBR POM, Stainless steel Note) u u Seal Cassette NBR POM, Stainless steel (1) i i O-ring Seal NBR NBR o o O-ring O-ring NBR NBR !

V100

Lead wire length 2000 mm -+ Socket Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire Connector Hook For DC V114-5LO SY100-30-4A-20 For AC V114A-1LO SY100-30-1A-20 2.