E-P HYREG ® VY1 Series

2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Ionizer

Note 2) Use standard power cables for 3 m and 10 m lengths.

SMC Wireless System PROFINET compatible

A 4 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, DC24 V +10/-5%, 2 A 8 A 4 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

Plug-in Unit

: Lead wire F, L, M and P kits 1 to 12 stations M Kit: Multiple connector C8 (For 8) C10 (For 10) T kit 1 to 10 stations 4150 S kit (without unit) Solenoid weight is not included.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

SMC Wireless System EtherNet/IP ® compatible

A 4 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, DC24 V +10/-5%, 2 A 8 A 4 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

IDX-OM-W023

M 10 M IDU8E/11E/15E1-10/20 10-1 ( ) IDU Series 10-1 10 1 IDX-OM-W023 10 M 10-2 ADM200 IDU8E15E1-10-M IDU8E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W (R1/2) (Rc3/8) Rc1/2 26 Rc1/2 IDU Series 10-2 10 2 IDX-OM-W023 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W023 11 R

Fieldbus system PROFIBUS DP compatible SI unit

Content 0 to 5 A channel number of 0 to 63 is displayed. 6 Input/Output Type: 00 = Reserved, 01 = Input, 10 = Output 7 -68No.EX-OMN0028-B Diagnostic type Bit No.

3 Port Solenoid Valve

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Response Time Response time ms (at 0.5 MPa) 7 or less Mass Valve model Number of solenoids 1 pc. (Single) 2 pcs.

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

Regulator

Option/Semi-standard symble:When more than one specification is required, indicate in alphanumeric order. 1 3 4 5 6 2 Symble Description 0.020.2MPa 0 0 0 0 Set pressure range 1 1 1 1 0.020.4MPa 2 2 2 2 0.020.8MPa + 1 Exhaust direction 0 0 0 0 Bottom exhaust + 2 Nil Nil Nil Nil Rc Pipe thread type NPT N N N N F F F F G + 3 Port size 01 01 01 01 1/8 + 4 Nil Nil Nil Nil Without pressure gauge

SRP

20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure

SRP

20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure

Compact Proportional Solenoid Valve Series PVQ

%& 9 Nut 10 Wave washer Round head combination screw % ) *+ ) ,-. / 0 12%*34+3*4 5 11 ! 12 Sub-plate !%' 13 O-ring ( 14 Option (Body ported only) Bracket assembly: VDW20-15A-1 O-ring ( Sub-plate Part No. -01 PVQ30-15 P (1) A (2) Thread type Material C S !%' '

Precision Clean Regulator Series SRP

20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

HRX-OM-I051

Alarm1 Water Leak Detect FLT 01 Alarm2 Incorrect Phase Error FLT 02 Alarm3 RFGT High Press FLT 03 Alarm4 CPRSR Overheat FLT 04 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Swivels

Housing Port Size (1/16 of an inch) Shaft Port Size (1/16 of an inch) Housing Port Configuration: 01 = Male NPTF(Non-Standard)* 02 = Female NPTF 03 = Male JIC 37 Degree 05 = Male SAE O-Ring Straight Thread 06 = Female JIC 37 Degree 07 = Female NPSM Pipe Swivel 10 = Female SAE Straight Thread JM = Seal-Lok Shaft Port Configuration: 01 = Male NPTF 02 = Female NPTF 03 = Male JIC 37 Degree 05