3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

Series AP500

to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS23 1FE-02 AS32 1FE AS33 1FE AS42 1FE AS43 1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

VM

roller VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Cross roller plunger Toggle lever VM220-02-08 VM230-02-08 VM-30AR Red VM220-02-30R VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM-32AR Red VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AB Black VM220

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 F.R.L.

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Note Symbol 02 Symbol 02 2 stations 2 stations Note 1) Connector mounting position Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... 10 02 11 02 11 stations 10 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout Note 2) Specified layout (up to 22 solenoids possible) (up to 21 solenoids possible) 20 20 20 stations 20

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

SZ3000

PG: Flat cable (20 pins) PH: Flat cable (10 pins) Valve stations F: D-sub connector P: Flat cable connector (26 pins) Symbol 02 Note Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring Note 1) ... ... ... ...

Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Non Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Non Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Non Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable, Option: X3 [Wetted Parts Stainless Steel (Movable Parts Inside are Brass)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]