Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 LEKFS25 Product weight[kg] 1.7 1.8 2.0 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.5 3.8 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 Product weight[kg] 3.6 3.8 4.0 4.2 4.5 4.7 4.9 5.1 5.3 5.5 5.9 6.3 6.7 7.1 7.5 0.53 Additional weight with lock[kg

Step Motor Driver （ Pulse input type ）

86 - LEY/LEYG Basic parameter default Model LEY16 / LEYG16 LEY25 / LEYG25 LEY3 2/ LEYG32 LEY40 / LEYG40 Lead[mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Controller ID 1 1 1 1 IO pattern 1 1 1 1 Acceleration/ Deceleration pattern 1 1 1 1 S-motion ratio 0 0 0 0 Storoke(+) 1000.00 1000.00 1000.00 1000.00 Storoke(-) -1000.00 -1000.00 -1000.00 -1000.00 Maximum speed 500 250 125 500 250 125 500 250 125 300

Membrane Air Dryer

500 300 500 75 110 Standard Performance conditions Purge air flow rate L/min(ANR) Inlet air pressure MPa 60 86 29 50 18 25 *Note3 0.7 25 Inlet air temperature oC Inlet air saturation temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} 25 Ambient temperature oC Relief type 1/4 3/8 Regulator construction (about Type V) Port size

A_HEC-OM-I009

HEC002-A 240 270 300 390 210 393 385 281 436 HEC006-A 270 300 280 370 240 390 382 278 455 Fig.4-3 Outside drawings of Thermo-con HEC002-A/HEC006-A 4-2 Unit Overview 4.5 Outline of operation The unit is operated as explained below. 4.5.1 Electrical diagram The unit is equipped with electrical circuits as shown below.

HEC_001W-E

C 400 300 200 10 20 30 100 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-3 Heating capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 600 Heating capacity W 500 Radiating water flow rate L/min 400 300 200 1 3 5 100 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

MLGC

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

MQQ

Piston speed (3) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage MQQ M 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa RHC Note 1) Use clean, dry air with no freezing.

Clean Gas Filter

(Refer to page 300.)

0.01

0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.03 0.03 Max. flow rate line Max. flow rate line 0.02 0.02 0.9 MPa 0.9 MPa 0.01 0.01 0 0 0 20 40 60 80 100 120 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 322 Clean Air Filter SFD Series Construction SFD100-C Component Parts Material No.

CYV

Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.

Flow Control Equipment

In-line style How to Order 1F 12 K 400 AS JIS Symbol Option Body size K N None Hexagonal lock nut Electroless nickel plated 100 200 205 300 400 M5 1/8 1/4 3/8 1/2 Indicate symbols in alphabetical order if two options or more desired. Applicable tube O.D.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

600 500 400 300 200 100 0 SQ2000 2.4 0.14 0.75 3.1 0.18 0.71 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Low Friction Cylinders Series MQ

Low Friction Cylinders Series MQ Metal Seal Type Compact Low Friction Cylinder Series MQQ P.1172 Series Bore size (mm) Operating pressure range (MPa) Actuation speed (mm/s) 10 16 20 25 30 40 MQQT Standard type 0.005 to 0.5 0.3 to 300 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to 0.7 0.5 to 500 Lateral Load Resisting Low Friction Cylinder Series MQM P.1181 REA Series Bore

Air Slide Table Series MXP

L2 Kinetic Energy 2 1 420 2 E = 0.2 () = 0.018 2 1000 V = 1.4 x 300 = 420 1 420 2 E = 0.2 () = 0.018 2 1000 V = 1.4 x 300 = 420 1 V 2 E = W () 2 1000 1 V 2 E = W () 2 1000 Find the kinetic energy E (J) of the load.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Maximum flow rate under positive pressure [L/min (ANR)] Inch size Metric size 100 200 300 Series ZFC5 4 5/32" 45 6 1/4" 100 ZFC7 6 1/4" 120 8 5/16" 250 10 3/8" 300 12 350 Flow rate (positive pressure) conditions: Supply pressure 0.1 MPa, Differential pressure 30 kPa Metric size: 5 sizes Inch size: 4 sizes Light gray Orange CAT.ES100-103A Series ZFC Series ZFC 2 types of transparent case

ITV

Count Pressure Characteristics Flow Characteristics Supply pressure: 0.6 MPa Set pressure: 0.25 MPa 600 1 500 kPa 500 Output deviation factor (% F.S.) 0.5 Set pressure (kPa) 400 kPa 400 Out 300 kPa 300 0 Return 200 kPa 200 0.5 100 kPa 100 50 kPa 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 2 1 3 4 5 6 0 7 1.0 Supply pressure (MPa) Flow rate (l/min (ANR)) 14-8-6 7 Compact Electro-pneumatic Regulator