Compact

BMY3-016 Auto switch model Tightening torque D-M9l(V) D-M9lW(V) 0.10 to 0.15 210 Solid State Auto Switch Direct Mounting Type D-M9N(V)/D-M9P(V)/D-M9B(V) RoHS Refer to SMC website for the details of the products conforming to the international standards.

VZ5000

Note Manifold block assembly C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 C6 C8 VQ7 VZ5000-50A-1q (a) Bolt (Both sides) For D side, With D-sub connector and P/R port with One-touch fitting for 10 For U side, With D-sub connector and P/R port with One-touch fitting for 10 SUP/EXH block assembly VZ5000-51A-1D w EVS D side SUP/EXH block assembly End block

Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

Large Size Vacuum Module: Series ZR

ZX L SET H ZR 59.5 ZM ZMA ZQ 109 (Port exhaust) 114 (With built-in silencer) ZH 1 ZU 1 ZL ZY ZF ZP SP ZCUK 18 20 ZR1 -D AMJ AMV For port exhaust 7.2 1 Exhaust (EXH.) port Rc 1/4 AEP HEP S S Related Equipment 75 Digital pressure switch for vacuum Attachment D 109 1 (Port exhaust) 114 1 (Built-in silencer) (75.8) 56 P PD 3 100 (2000) Filter block D Dimensions not indicated are identical to

48

D-G

44

Width across flat Effective area (mm2) Connection thread R A Weight (g) L M d Model H1 H2 I.D.

Compact Guide Cylinder

D-G

End Lock Cylinder Series CBJ2

) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7

Compact Cylinder

D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43 80 52.5

SJ3A6

With light/surge voltage suppressor Note) D: Push-turn locking slotted type Note) The electrical connection will be +COM. spec. 75 Series SJ3A6 Dimensions SS3J3-V60U/D/B Stations One-touch fitting [3/5(E) vacuum pressure port] Applicable tubing O.D: 8 (Pitch) P = 10 M5 x 0.8 [2(B) vacuum pad port] 23.6 12.8 15.6 23.8 3/5 (With needle fully opened 62.8) F2 F2 F2 F2 F2 30.6 46.2 1 2 2 2 2 2

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

NB A S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 Double clevis style (D): CJ5DS R V CDH9 + 0.030 0 NB GA 0.030 0.060 Clevis pin ( ) Cdd9 Piping port 2 x M5 x 0.8

Fieldbus system EtherCAT compatible SI Unit

, dual-side D code Plug, Straight 5 m EX9-AC100EN-PSPS: Cable with M12 connector, dual-side D code Plug, Straight 10 m EX9-AC005EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 0.5 m EX9-AC010EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 1 m EX9-AC020EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 2 m EX9-AC030EN-PAPA: Cable with M12 connector

JXCx-OMU0026

D < Details > Position deviation counter in the controller has overflowed. (Position error Alarm) Position error counter overflow (151) RESET and SVON is ON D Check if the actuator travel has been interrupted.Also, make sure that the load, speed, acceleration and deceleration are within the range of the actuator.

T

(mm) 12 3.2 4 6 8 10 D Tubing I.D.

JXCx-OMT0002

JXC-OMT0002-C (1) From power on to Return to origin . 74 (2) Positioning operation . 75 (3) Pushing operation . 76 (4) HOLD . 77 (5) RESET . 77 (6) STOP . 79 (7) Area output . 80 12.

VEX1

1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2)

SFOD-OMT0009CN

(c)BUSY ONINP OFF No. () (d)INP ONBUSY OFF INP ON BUSY OFF (INP ONBUSY OFF) 2 ABS 75 No.SFOD-OMT0009CN-B (3) --(a)No.(INx) (b)DRIVE ON Min.15ms No.(OUTx ) No. No. (c)BUSY ONINP OFF (d)INP ON 2.5[s] ALARM ON( ) BUSY OFF INP ON BUSY OFF 1)(0-149) 2)(d) 2 ABS 76 No.SFOD-OMT0009CN-B (4) HOLD --(a)(BUSY ON)HOLD ON (b)BUSY OFF () No. (c)HOLD OFF No.

JXCx-OMT0001CN

(100) (2)2mm 2 D (3) 40 50mm ()100mm 100 -33No.JXC-OMT0001CN-C 5.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.