High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

In-line Air Filter

500 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC77 12 0.3 MPa 30 Pressure drop [kPa] 0.1 MPa 20 0.5 MPa 10 0.7 MPa 0 0 200 400 600 Flow rate [L/min (ANR)] 4 ZFC Series Construction Component Parts Replacement Bracket Part No.

Large blow and

Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] 1,600 700 ---6 ---6 Discharge flow rate Discharge flow rate 1,400 Vacuum pressure [kPa] Vacuum pressure [kPa] 600 Vacuum pressure Vacuum pressure ---5 ---5 1,200 500 ---4 ---4 1,000 400

AMD

B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57. 14-20-28

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

RB/RBL/RBQ

Selection of applicable model 78.5 94.2 110 173 188 236 393 Selection of applicable model According to Data D , the tentatively selected RB2015 satisfies Me = 260 kg < 400 kg at = 0.3. Ultimately, it will result in an operating frequency of n20 < 25, without causing a problem.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 to 60C Ambient & fluid temperatures 50 to 400 mm/s Piston speed Rubber bumper on both ends Bumper Non-lube Lubrication +1.5 0 mm Stroke length tolerance Manual type Table rotation system Right, left, free repetetive rotation Table rotation direction

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maximum speed (mm/s) 100 All strokes 200 300 400 600 800 500 Stroke (mm) CX (1) (2) (3) 8 Selection graph D(4) (5) (6) (7) 12 to 40 -X Horizontal Mounting 20Data W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

RS2H-OM0045P

. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -1-1.(RS2H50) -1-2.(RS2H63 -1-3.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

CEx-OML0058

50 40 40 100 100 300 300 200 400 500 200 400 500 D o e s t h e m o u n t e d l o a d / P i s t o n s p e e d ( /) e x c e e d t h e l o a d g i v e n i n P i s t o n s p e e d ( /) t h e d i a g r a m ? H o r i z o n t a l m o u n t i n g V e r t i c a l m o u n t i n g S e l e c t i o n ..

Compact Rotary Actuator

The end angular speed is obtained by: Table8 Allowable kinetic energy Size Allowable kinetic energy mJ Cushion angle No cushion Cushion type 10 0.25 15 0.39 20 25 120 40 30 48 250 40 40 81 400 40 Allowable kinetic energy of cushion type is max. adsorption energy when the cushion needle adjustment is optimum.

MHS

16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400

IDX-OM-W037

Checks and Maintenance 6.1 Specifications erature bowlItem Specification Outlet air pressure dew point 10 o C IDH410 IDH4 20 IDH A 423 Rated performance IDH6 10 ) release bushOutlet air temp IDH 6 20 IDHA 6 23 (2) Mounting of the bowl assembly Note 1 ) 2) ir flow capacity 400 L/min ANR Operating range Fluid Compressed air Amount of air processed 100 to 5 00L/min ( 600 L/min ANR Inlet

Membrane Air Dryer

0.94) 0.78 (0.91) 0.81 (0.94) 0.78 (0.91) 0.8 (0.94) Mass kg (With bracket) Model Specifications IDG60LA IDG75LA IDG100LA IDG60SA IDG75SA IDG100SA Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 224 308 400