SMC Corporation of America
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P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Note 2) Dimension when the rod is extended is to be added to clamp stroke plus rotary stroke. 7 Rotary Clamp Cylinder: Standard Series MK Head end flange: MKG With boss on head end +0.15 2 x 6.3+0.05 4 x G (Special cap bolt) Ah9 B E D C A 4 x F R + Clamp stroke (mm) (mm) Ah9 A D E G F C B Model MK32-F MK40-F MK -F Model MKG32 MKG40 MKG50 MKG63 0 0.052 5.5 48 65 8 0.15 56 0.1 34 21 M6 x 1.0

4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (

... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

<> (19) 1 [P_1][n_1] 1 1 2[P_2][n_2] 2 (P1L P1H ) P1L()P1H() (n1L n1H) (24 ) 1 -20No.PS-OMM0002CN-F 2 [F 0] [F] 2 2 [F][-] [F 0] 23 ISE80(H) MPa ""M ZSE80(F) kPa ISE80(H) P ZSE80(F) psi [F 1] OUT1 24 ISE800.500 MPa ZSE80-50.5 kPa ZSE80F50.0 kPa ISE80H1.000 MPa ON OFF ISE800.050 MPa ZSE805.1 kPa ZSE80F5.0 kPa ISE80H0.100 MPa ON OFF -21No.PS-OMM0002CN-F [F 2] OUT2 27 [F 1]OUT1

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Boss-cut MK(2) RS

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

I N M C B P: For mounting 4 locations H A G Drawing indicates conduit terminal type.

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -24No.LV50***-OMQ0004-F Characteristics Chart Flow characteristics (Pressure loss) LFE1 LFE2 0.02 0.02 Pressure loss [MPa] Pressure loss [MPa] P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Flow rate

Zb2 JJ Q1 H Eb Eb Zb1 JJ H Eb Eb P A2 A1 L (Counterbore depth) L (Counterbore depth) 2 x 2 x LD Detail drawing of Zb2 (Adjustable range) Detail drawing of Zb1 (Adjustable range) 2 x 2 x LD MY3 Floating Bracket Mounting Dimensions (mm) Applicable cylinder Model Common JJ L P LD H G 1 1 1 Applicable cylinder Model Common JJ L P LD H G Adjustment range Adjustment range Ea Eb Ea Eb MY316 MY320

Thi s product i s adj ust ed f or each speci f i cat i on at t he t i m e of shi pm ent f rom t he f act ory.

Thi s product i s adj ust ed f or each speci f i cat i on at t he t i m e of shi pm ent f rom t he f act ory.

246 to P. 253 None Cushion Rubber cushion Air cushion With auto switch Variations 20Copper-free (Standard) Single shaft with four chamfers X Double shaft key Y Double shaft with four chamfers Z P. 254, P. 255 Shaft type Single round shaft T DDouble shaft (Without long shaft key) J Double round shaft K Shaft end form Pattern P. 256 to P. 270 Shaft and parallel key stainless steel spec.

(ZSE30AF (for compound pressure) 3.5% F .S.) Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15