CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

4-channel Flow Monitor ( compatible)

Remarks Power supply/output cable ZS-26-L Length 2 m For PF2A5##, PF2W5##, PF3W5## Connector for sensor lead wire (e-con) ZS-28-CA-4 1 pc., Finished outside diameter: 1.15 to 1.35 Cover colour: Blue For PF2D5## Connector for sensor lead wire (e-con) ZS-28-CA-2 1 pc., Finished outside diameter: 0.9 to 1.0 Cover colour: Red Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof

High Vacuum L Type Valve

C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

High Vacuum L Type Valve

C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction Individual exhaust spacer Gasket Spacer E M2.5 x 36 (2 pcs.)

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

When ordering a valve with a lead wire of 600 mm or longer, be sure to indicate the model number of the valve without connector and connector assembly. Plug connector lead wire length The length of the lead wire provided is 300 mm. When ordering a valve with a lead wire of 600 mm or longer, be sure to indicate the model number of the valve without connector and connector assembly.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

RSH

1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

XL-OMY0001

/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H

IDX-OM-W037

Carry out checks to confirm there is no air leakage. 1 1 Cap bolt OUT IN 4 4 3 3 2 2 5 5 6 No Part name Part number IDH4 IDH6 1 Body 2 Element Element assembly AMHEL350 3 Gasket Element assembly AMH-EL250 4 O ring 5 Housing Case assembly AM-CA250C-D [For Option E] AM-CA250C-C Case assembly AM-CA350C-D [For Option E] AM-CA350C-C 6 Auto drain (2) Super mist separator element replacement procedure

OMR0031

The table e is moved based on the user defined settings. -Necessary settings: Target position, speed, acceleration, deceleration and load mass.

IDX-OM-W034

Size Dimensions (inch [mm] ) A B C D E F G H J K L M N P 23.6 [600] 3.3 [85] 12.4 [314] 0.5 [13] 30.5 [775] IDFB22E 1 11.4 [290] 24.5 [623] 5.3 [134] 15.9 [405] 27.5 [698] 1 [25] 3.7 [93] 1.8 [46] 13.4 [340] 26.8 [680] IDFB37E 1/2 33.7 [855] IDFB Series 6-2Refrigerant with GWP reference 6 2 IDX-OM-W034 Air Dryer 6 References IDFB55E / 75E R UNIT : inch [mm] Q AIR INLET AIR OUTLET A PORT

IO-Link/ELECTRO-PNEUMATIC REGULATOR

COMMUNICATION The range of the LED pressure display is different according to the pressure range and the unit of the display. unit ITV*01* ITV*03* ITV*05* ITV209* MPa 020 to .120 100 to 600 180 to .A80 Kgf/cm2 020 to .120 100 to 6.00 180 to A.80 bar 020 to .120 100 to 6.00 180 to A.80 PSI 30 to 18.0 140 to 84.0 -26 to 156 kPa -20 to 120 -100 to 600 -180 to A80 16 to -96 (note1)The mark ""

Heavy Duty Stopper Cylinder Series RSH/RS1H

RSH20, 32 Graphq Graphw 1.0 RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] 0.8 1300 1300 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 600 600 0 500 100 200 300 400 63 Lateral load F [N] 500 500 50 400 400 RS1H50, 63,

Large blow and

Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8

LJ1H

A B C D Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) 15 20 25 30 1000 1000 930 740 600 500 Model Note LJ1H202PC-500LJ1H202PC-600LJ1H202PC-700LJ1H202PC-800LJ1H202PC-900LJ1H202PC-1000700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-1B2H1Power supply: 200/220(V)AC 10% Compatible controller

Single Axis Electric Actuator Series LJ1H

A B C D Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) 15 20 25 30 1000 1000 930 740 600 500 Model Note LJ1H202PC-500LJ1H202PC-600LJ1H202PC-700LJ1H202PC-800LJ1H202PC-900LJ1H202PC-1000700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-1B2H1Power supply: 200/220(V)AC 10% Compatible controller

Digital Flow Switch (Remote type monitor unit)

[February 2017] E: Contents revised in several places.[March 2018] F: Contents revised in several places.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33