Model Selection 1

Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage

VZ1000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Port size For sub-plate, manifold type 40, 41, 42, 43 Nil: Without sub-plate R port P, E port 3: Common exhaust type for main and pilot valve D: Push-turn locking slotted type R port P, E port (With gasket and screws) 01: 1/8 With sub-plate Electrical entry 24, 12, 6, 5, 3 VDC M8 connector 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24,12 VDC 100,110, 200, 220 VAC Grommet L plug connector M

End Lock Cylinder Series CBG1

0 -0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

Turntable Cylinder Series MGT

50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) Eccentric distance l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

Clean Air Module

Bushing e Check that the connecting brackets B (at two positions) are attached, and insert the bushing projection of the pressure outlet port assembly into the indent of the air operated valve assembly. Similarly, insert the end plate assembly into the pressure outlet port assembly.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

C D E F Dimensions Part no.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

CE

0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 g (mm) mm 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70 84 98 112 126 140 154 168 32 260 297 334 371 408 445 482 556 630 40 462 499 536 573 610 684 758 906 1054 50 1015 1243 1699 63 1105 1333 1789 3-3-3 2 (m1+m2)V E(J= m1 kg m2 kg V m/s 4. 4-1 CE1 4-2 A A B B C COM(OV) D COM(OV) E 12 24V F 0V G CEU5 CEU5

IDX-OM-W037

Carry out checks to confirm there is no air leakage. 1 1 Cap bolt OUT IN 4 4 3 3 2 2 5 5 6 No Part name Part number IDH4 IDH6 1 Body 2 Element Element assembly AMHEL350 3 Gasket Element assembly AMH-EL250 4 O ring 5 Housing Case assembly AM-CA250C-D [For Option E] AM-CA250C-C Case assembly AM-CA350C-D [For Option E] AM-CA350C-C 6 Auto drain (2) Super mist separator element replacement procedure

Clean Gas Filter

Construction q t e r w IN Description No.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

C D E F Dimensions Part no.

AC Servo Motor Driver (SSCNET Type)

D 3 Set the test operation select switch to the Up Position, when performing the test operation mode by using set up software (MR ConfiguratorTM) E 2 F 1 0 (Note) This table indicates the status when the switch is set to "Down".

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

r t q w e r t i i o o !

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Compact Cylinder with Solenoid Valve/

A contact protection box is not required for solid state auto switches due to their construction. q Where the operation load is an inductive load. w Where the wiring length to load is greater than 5 m. e Where the load voltage is 100 VAC.

Air Slide Table/Long Stroke Type Series MXY

500 280 560 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load mass W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

VQC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQC2000 800 700 600 500 400 300 200 100 0 VQC4000 Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

04 Port size Thread type Body size 02 03 04 06 10 12 14 20 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 R NPT Nil N 200 300 400 500 600 700 800 900 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications Max. operating pressure (1) Fluid Compressed air 1.0 MPa 30 dB (A