Steam Valve

2.3 2.3 30 35 43 49 61.5 74 637 A VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port 12(P1), 10(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32A VND60D-40A VND70D-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120

3

VXS VXS VXB VXE (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + T When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + T Conversion with sonic conductance C: VXP VXR VXH VXF VX3 VXA S = 5.0 x C(5) Q : Air flow rate[L/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream

WRF100

When clamping with the clamping position offset horizontally, ensure that the offset is 120 mm or less from the center of cylinder. With a large offset, twisting forces will be applied to the cylinder. This twisting force can potentially accelerate wear and breakage of parts with the abrasion of sliding parts.

XLAQ/XLDQ

B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.

High Vacuum Angle Valve

Temperature distribution of the 120C specification Comparison with a KF25 flange 140 e, r, t 120 eBody 1 Temperature [C] 100 rBody 2 tBody 3 80 q, w 60 40 Heater wBellows 20 qValve 0 0 30 60 90 Time [Minute] Lightweight, Compact Large conductance, small body, excellent resistance against fluorine corrosion (body) XLA series Model A1 [mm] B [mm] Weight [kg] Conductance1 [L/s] XLA-16-2 40 108

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Vacuum pressure reached [kPa] 91 Standard supply pressure [MPa] 0.35 Standard supply pressure Response Time [ms] ZHPBM-07ZHPBM-10ZHPBM-12ZHPBM-15 63 295 143 120 86 80 455 221 190 140 Nozzle size Pad dia.

Stability of suction position,

aging resistance Excellent heat resistance, and cold resistance Excellent mechanical strength Best heat resistance, and chemical resistance Pure gum property (specific gravity) 1.00-1.20 0.95-0.98 1.00-1.30 1.80-1.82 Impact resilience v g Abrasion resistance u to g Physical properties of blended gum Tear resistance v u to g v Flex crack resistance v u to v v Maximum operation temperature C 120

AMF

Activated carbon element with large filtration area (1420 m2/g) Easy replacement of elements Model/Piping Support Type Model 8000 AMF801 24000 AMF901 Rated flow (l/min (ANR)) 2B, 3B, 4B flange 120 Port size (Nominal size B) 2B flange Weight (kg) 40 Specifications Compressed air 1.0 MPa Fluid Max. operating pressure Min. operating pressure Proof pressure Ambient and fluid temperature Filtration

Series HAW Water Cooled Aftercooler 1

140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1

Heatless Air Dryer Series ID 1

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

Special Specifications:

x 120 x 236 140 x 140 x 383 180 x 170 x 465 63 x 63 x 136 80 x 82 x 170 90 x 90 x 233 140 x 140 x 380 140 x 140 x 490 140 x 140 x 590 80 x 80 x 153 90 x 90 x 216 140 x 140 x 250 140 x 140 x 360 140 x 140 x 460 AFF4B AFF22B AFF37B AFF75B AM150 AM250 AM350 AM550 AM650 AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMF250 AMF350 AMF450 AMF550 AMF650 Main Line Filter 14-20-9 Mist Separator 14-20-

CRQ2

Weight JIS Symbol (g) Standard weight Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Values less the weight of auto switch. Precautions Be sure to read before handling. Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series.

JA/JAH/JB/JS

152 178 191 18 18 24 38 42 49 1.25 2 2 2.5 3 3 11000 18000 28000 54000 71000 71000 0.58 1.08 1.5 2.7 4.8 5.4 Option: Heavy Load Type Hydraulic: Up to 7 MPa JAH63-24-200 JAH80-30-200 JAH100-42-300 63 80 100 24 30 42 31 41 55 35 45 66 79 96 13 14 16 27 30 36 20 22 24 41 46 55 2 2 3 74 94.5 112 120 152 178 24 38 42 2 2.5 3 28000 54000 71000 1.5 2.7 4.8 10-19-8 9 Floating Joint: Heavy Load

MK

MI W S CEP1 Graph (2) CE1 3 MK250/63 CE2 Mounting bolt for MK2B 2 When arms moment of inertia is 5 x 103 kgm2, cylinder speed should be less than MK232/40: 66 mm/s MK250/63: 120 mm/s. For calculating moment of inertia, refer to page 10-7-21. Mounting method: Mounting bolt for through-hole type is available as an option. Ordering: Add the word MK2B in front of the bolts to be used.

MVGQ

Nil: Non-locking push type Manual override Body option B: Locking type B (Slotted) 0: Pilot valve individual exhaust type Manual override Manual override Rated voltage 1 2 3 4 5 6 7 9 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other C: Locking type C (Manual) R port P/E port Manual override Light/Surge voltage suppressor

RZQ

RB RZQ Mounting Bolt J C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l D9.5 8 -X 10 8.5 20Data 16.5 11.5 3 17.5 12.5 3.5 10-10-5 6

Table of Contents

Construction. 112 112 114 115 119 120 120 122 125 127 127 128 128 130 130 133 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 135 135 136 138 144 139 145 145 145 146 146 147 147 149 151 156 157 158 158 159 159 160 162 164 165 166 169 182 182 183 183 186 187 191 199

CQS

Foot or Flange style: Body mounting bolt 7-4-21 22 Series CQSW Weight/Without Auto Switch (g) Calculation: (Example) CQSWF12-10DM Cylinder weight: CQSWB12-10D46 g Option weight: Rod end male thread5 g : Rod side flange style 58 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 12 38 46 54 62 69 77 109 g 16 50 61 71 81 92 102 20 89 104 120 136 152 167 183 199 215 231 25

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

Guide Table Series MGF ø40, ø63, ø100 1

9 to @3 from the table above. 63 MGF63-PS 100 MGF100-PS 8-23-9 10 Series MGF Dimensions: 40 MGF40 4-M8 x 1.25 through 100 120 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 90 9.5 36.5 + Stroke 8 46 + Stroke 7.5 18.5 2-Rc 1/8 port for extending cylinder When the