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149 74 m 105 m 149 m 2B 2 1/2B 3B 3 1/2B M Micromesh Element 4B FH FH Note) For flange connection only.

AS331FG-N03-07 10 63 56 21 1/4" 17 32.6 52.4 45 25.6 38.7 13.2 43.7 18.5 23 16.2 20.6 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 12 40.4 65 59 40.2 35.2 22 5/16" 18.5 34.4 54.2 48 28.2 39.7 15.2 44.9 20.9 23 19 AS431FG-04-10 AS331FG-N03-11 10 104 65 21 3/8" 21 32.6 52.4 57.1 32.6 43.7 17.9 49.4 18.5 25.8 16.2 23 16.2 R 1/2 56.7 49.2 24 49.6 42.1 28.6 AS431FG-04-12 AS431FG-N04-11 12 105

D-H7C D-B5, D-B6, D-B59W Auto switch Hs Hs Auto switch Single Acting, Spring Return Single Acting, Spring Extend Bore size (mm) A B All stroke A Bore size (mm) B Auto switch model Auto switch model Hs 150 200 Hs All stroke 25 75 25 75 50 100 50 100 125 125 150 200 20 20 30 24.5(27) 24.5(27) 55 80 45.5 70.5 55 80 45.5 70.5 105 95.5 20.5 D-C7 D-C8 D-C73C D-C80C D-C7 D-C8 D-C73C D-C80C 25 25

light VQ4 Manual override VQ5 VQZ VQD Mounting hole for 4-M5 ~ = 4 n 2 1 3 4 5 6 7 8 Stations D side U side 3(R) EXH port DIN rail clamp screw P = 16 2n-C4, C6, C8 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 C8: One-touch fitting for 8 1(P) SUP port < >: AC Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) L n 2 85 105

M E F 3 3 12 12 12 12 G 12 12 N SMC SMC O P NOTES: 1) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 3/4, 1 6 PORTS,1,3,5 PORTS 2) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 1/2, 3/4,1 2 PORTS,2,4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SIDE U SIDE D n 3 STATION 2 1 SMC SMC BB 2 2 2 2 2 2 AA S R Q 4 4 4 4 4 4 U T X Y Z V W PITCH NOTE #2 177.5 A 119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

24.5 (27) 45.5 45.5 70.5 70.5 95.5 24.5 (27) 20.5 30 CA1 D-C8 D-C8 55 55 80 80 105 130 130 27 (29.5) 45.5 45.5 70.5 70.5 95.5 27 (29.5) 20.5 30 120.5 120.5 D-C73C D-C73C 56 56 81 81 106 131 131 30.5 (33) 46.5 46.5 71.5 71.5 96.5 30.5 (33) 21.5 31 121.5 121.5 CS1 D-C80C D-C80C 60.5 60.5 85.5 85.5 35 (37.5) 49 49 74 74 35 (37.5) 24 35.5 110.5 135.5 135.5 99 124 124 54 54 79 79 44.5 44.5

Mass (g) A D1 D2 L1 L2 M Model KQ2L23-M5 KQ2L23-01S KQ2L23-02S KQ2L04-M5 KQ2L04-M6 KQ2L04-01S KQ2L04-02S KQ2L06-M5 KQ2L06-M6 KQ2L06-01S KQ2L06-02S KQ2L06-03S KQ2L08-01S KQ2L08-02S KQ2L08-03S KQ2L10-01S KQ2L10-02S KQ2L10-03S KQ2L10-04S KQ2L12-02S KQ2L12-03S KQ2L12-04S KQ2L16-03S KQ2L16-04S 3.2 M5 x 0.8 13.2 14.3 12.7 2.5 8 18 2.7 3.6 10 19 3.2 4.1 12 22 33 13 21 35 25 26 36 63 28 38 65 101 105

M-type plug connector (M): VQZ3 2 (R)-M1-C6, C8, C10 0 1 1 8 9 43.3 [50.3] Approx. 300 (Lead wire length) 95.2 [97.4] 1/4 [4(A), 2(B) port] 90.2 18 38.5 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC L-type plug connector (L): VQZ3 2 (R)-L1-C6, C8, C10 0 1 1 8 9 DIN terminal (Y): VQZ3 2 (R)-Y1-C6, C8, C10 0 1 1 8 9 112.9 Max. 10 Approx. 300 (Lead wire length) 105

23 3 3.5 M5 x 0.8 10 5 16 14.5 10 19 16 54 25 62 46 56 38 24 44 110 200 17 27 60 105 24 3 3.5 M5 x 0.8 10 5 20 13.5 10.5 25 18 70 30 81 54 72 44 24 44 120 200 300 29 39 77 117 167 28 3 3.5 M6 x 1.0 12 17 25 12.5 13.5 30 26 78 38 91 64 82 50 24 44 120 200 300 29 39 77 117 167 34 4 4.5 M6 x 1.0 12 17 MGPM (Slide bearing) A, DB, E Dimensions [mm] MGPL (Ball bushing) MGPA (High precision

N.C. valve LVC 1/46 LVA Q LVH LVD LVQ Rc 1/8 (NPT 1/8) Sensor (breathing) port LQ1 E R (P) LVN LQ3 integral fitting 1/8 (3, 4) TL/TIL Pilot port Rc 1/8 (NPT 1/8) Pilot port LQ3 F K 1/46 1/46 1/46 1/46 A B A B J G L (H) Pilot port Rc 1/8 (NPT 1/8) Threaded type N M C A B D 1/46 1/46 (mm) LVQm0S-Zm Dimensions (N.C. valve) A 25.5 B 46 C 31.5 D 58 E 33.6 F 56.5 G 12 H 105 J 21.8 K 37 L 5 M 7

The minimum bending radius : Min. 45mm. 5 107 1 108 a 1 107 a : Long flex life encoder cable Long flex life motor power cable Long flex life motor brake cable Robot encoder cable Robot motor power cable Robot motor lock cable 5 106 1 106 b : Standard encoder cable Standard motor power cable Standard motor brake cable 5 105 lock cable Flexing life [times] 1 105 5 104 1 104 b 5 103 1 103 4

6.7.2 Programming examples of read instruction code . 105 6.8 Write instruction code No. (8010h to 91FFh) . 106 6.8.1 Timing chart of write instruction code . 109 6.8.2 Programming examples of write instruction code . 109 6.9 Respond codes (RWrn+2) . 110 7.

It remains 0 during a normal latch operation. 8-105 8 MECHATROLINK-II Commands 8.17.7 Release Latch Mode (LTMOD_OFF: 29H) LTMOD_OFF Byte Description Command Response 17 29H 29H Releases the latch mode.

Start operation. 8-105 8 MECHATROLINK-III Commands Note 1. If the DRIVER enters the HWBB status while sending an SV_ON command, reset the /HWBB1 or /HWBB2 signal and then send a command other than SV_ON, such as SV_OFF. Then, send the SV_ON command again to restore the normal operation status. 2.

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

ZQ-OM01301-A 9.4 Vacuum Switch Specification ZSE10 Pressure switch Pressure switch for Product Number Vacuum vacuum with for compound pressure switch pressure energy saving function Rated pressure range [kP] 0 to -101 -100 to 100 Set / display pressure range [kPa] 10 to -101 -105 to 105 Proof pressure [kPa] 500 Lowest configurable increment [kPa] 0.1 Applicable fluid Air, non-corrosive gas

(Other than bit 2, the value is always fixed to zero) Assembly Object Instance Data format (vendor specific) Bit ID Byte offset 7 6 5 4 3 2 1 0 105 (Diagnostic Status) +0 0 0 0 0 0 X 0 0 SOLV Status 0: Valve power supply voltage is normal 1: Valve power supply voltage is abnormal -18No.EX-OMN0013-I Output number assignment Output data : The output number refers to the solenoid position on