Guide Table Series MGF ø40, ø63, ø100 1

10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

Fluoropolymer Tubing Variations

0.4 0.1 0.05 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Operating temperature C How to Order 1.2 Metric size Max. operating pressure MPa D 20 TLM0425 N 1.0 0.8 E Tubing designation Length per roll Symbol 10 20 50 100 2S 0.6 F Type Length 10 m 20 m 50 m 100 m 2 m 0.4 Color indication G Roll Symbol N R BU B Color Translucent (Material color) Red (Translucent) Blue (Translucent) Black

DOC1001322

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

NAAMS Standards Compliant

250 300 0 50 100 150 200 250 300 Arm length [mm] Arm length [mm] Bore size: 63, Arm length: 200 mm, Operating pressure: 0.5 MPa With an arm length of 200 mm and an operating pressure of 0.5 MPa, according to the graph, the maximum clamping force is 2000 N.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

CG1

16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15

Heavy Duty Stopper Cylinder

B 23.5 A 7.0 B A 10.5 (13.0) B Bore size 50 63 80 23.5 19.5 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) The values inside ( ) are for the D-A96/A96V.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

3

Maximum flow of rated flow range Pressure Loss (Reference Data) PFMC7501 (for 500 L/min) PFMC7102 (for 1000 L/min) PFMC7202 (for 2000 L/min) 50 50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10

HEC_W-E

HEC006 HEC012 HEC006 HEC012 Model No. label Model No. label Fig.4-1 Position of Model No. label Fig.4-2 Legend of Model No. label 4-2 Unit Overview 4.4 Appearance 4.4.1 HEC006 (C) 4xG D E A B F A B C D E F G HEC006 240 390 497 214 458 482 7 Unit: mm Fig.4-3 Outside drawings of HEC006 4-3 Unit Overview 4.4.2 HEC012 (C) 4xG D E A B F A B C D E F G HEC012 300 448 565 190 526 550 7 Unit: mm Fig

Clean Room Rodless Cylinder Series CYP ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

LEC-OM032xx

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2CN Communication cable PC PC is prepared by customer) Refer to 8CN2TB/PC Power supply connector for usage.

AC Servo Motor Driver (Pulse input type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.