LA-OMP0023

Note 7) 130 190 250 360 Table weight [g] 50 70 90 110 Note 1) Continuous thrust can be generated and maintained continuously.

3 Position Cylinder Series RZQ

If reapplication of grease is needed, apply grease specifically provided for this purpose: Maximum speed (mm/s) Grease: Product name: Grease pack Part No.: 10 g GR-L-010 150 g GR-L-150 2. Use the cylinder in applications in which the overrun will not cause any problem. 2. When dynamic seals are replaced, use a seal kit provided for each bore size.

Regulator for 2 MPa Series ARX20

300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20 ARX21 0.89 0.88 0.37 0.36 0.87 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 0.86

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Flat finger [3] 4 x MM thread depth L Thread for mounting attachment K J A A D G B D B K J F C S W O (mm) Weight (g) F G Open Closed 2 2.5 3 4 L MM J K D C B Model A W MHZ2-10D3 1), 2) 11221122112211220 -0.05 0 -0.05 0 -0.05 0 -0.05 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.025 0 +0.025 0 +0.025 0 +0.030 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 60 125 250 450 5 6 8 10 M2.5 x 0.45 M3 x 0.5 M4 x 0.7

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

PEAPP Series

500 1,000 100 250 500 1,000 100 250 500 1,000 100 250 * 500 1,000 100 250 * 500 100 250 500 1,000 100 250 500 1,000 100 250 500 100 250 500 0.6 1.5 3 6 1.1 2.75 5.5 11 1.5 3.75 7.5 15 2.1 5.25 10.5 21 2.5 6.5 13 1.2 3 6 12 2.3 5.75 11.5 23 3.4 8.5 17 5 12.5 25 Features: 1/4 4mm Economical and lightweight LLDPE resin provides excellent environmental stress crack resistance Six colors Excellent

AMF

Accessories (Options) Applicable model Bracket assembly AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Symbol BM51 BM52 BM53 BM54 BM55 BM56 BM57 spring washer With cap bolt, AMF Refer to ''Precautions" on p.4.6-33. 4.6-27 Odor Removal Filter Series AMF AMF150 to AMF850 How to Order AMF 250 03 R B Option R IN, OUT reversal Body size Accessories (Optional) 150 1 8 250 1 4 350 3 8 450 1 2

ZSE F/ISE

Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings) Variations R 1/ 4, NPT 1/4, G

VXA21/22

11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Multistage Ejector Series ZL

E EB EE For EE (ZSE4E) With digital vacuum pressure switch Lead wire length 0.6 (3.0)m Lead wire length 0.6 (3.0)m Lead wire length 0.6 (3.0)m 27 26 67 NPN output Analog output PNP output Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Round Type Hydraulic Cylinder

L tap 4 x J counter bore Related Products 4 x K 20: I-020B 25: I-032B 32: I-04A 40: IA-04 RR1 NDH10 DI A B E F G MM 45 RR1 MM NDH10 D +0.2 +0.1 E1 M C E1 R U U1 U1 A1 NX 8.6 A1 L1 L1 NX H Material: Cast iron Material: Rolled steel Material: Cast iron U (H8) Applicable bore size (mm) Part no. H G I J K L Part no.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

water (Water droplet) (g) How to Order x 100 Inflowed water (Water droplet) (g) Various equipment for drain discharge AMG 250 03 J B Option Body size HA 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 J Drain guide 1/4B female thread R IN-OUT reversal direction Note) Element service indicator (symbol: T) is not available as an option because

Rotary Cylinder Series MRQ Size: 32, 40 1

D20Weight Rotating angle Flange (g) Basic weight (g) Add'l stroke weight (g/mm) Size 80 to 100 1400 4 500 32 170 to 190 1500 80 to 100 2100 40 5 500 170 to 190 2300 Calculation: (Example) MRQBS32-50CA Basic weight 1400 g 4 x 50 = 200 g Stroke additional weight Total 1600 g For the weight of auto switch alone, refer to page 11-11-1.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 LEKFS16 Product weight[kg] 0.9 1 1.1 1.2 1.3 1.4 1.5 1.5 1.6 1.7 0.12 Additional weight with lock[kg] LEKFS25 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 Product weight[kg] 1.7 1.8 1.9 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.4 3.7 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200

No more element replacement!

Low Maintenance Filter Low Maintenance Filter Series FN1/FN4 Series FN1/FN4 New Series FN4 FN4 Series FN1 FN1 Series FN4 Series FN1 Series FN4 FN4 Series FN1 FN1 Flow rate max. 250 l/min max. 80 l/min max. 40 l/min Series FN4 with four elements is added!

Support Guide/11-LEFG Series

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

PF3W7x.eng

Supply power : Arbitrary display [F 0] Piping port (OUT side) With units selection function [ Unit] Display unit setting [ G] gal/min, oC Accumulated value is displayed (Power value is displayed) Peak hold temp. set value Bottom hold temp. set value Fluid temp.

MGP

MGP M 25 30 M9BW M L A S 2 S 1 n n ( 12 12mm 40 40mm 16 16mm 50 50mm 20 20mm 63 63mm 25 25mm 80 80mm 32 32mm 100 100mm A (MGPM,L,A 16100) M5X0.8 Rc N NPT TF G (mm) 2. (mm) MGP12,16,20,25,32,40,50,63,80,100 MGP-A 16,20,25,32,40,50,63,80,100 MGPS50,80 3.