Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Auto Switches: M9B, Lead Wire Length(m): 5, The number

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Auto Switches: M9B, Lead Wire Length

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: High speed / high frequency, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.12～1.0, Cushion: Rubber bumper at both ends, Port thread type: M5 x 0.8, Auto Switches:

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 100, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Max. Pressure(MPa): 1, Operating Temperature Range(°C): -10～-60, Auto Switches: M9B, Lead Wire Length(m): 5, The number of the switches: 2, Specification: Standard built-in magnet, Port Screw Type: Rc1/4, Clevis width(mm): 16.5, Tip fitting:

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, Bore: 20mm, Port Thread: Rc, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Leadwire or Prewired Connector: 5m, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, Bore: 20mm, Port Thread: NPT, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Leadwire or Prewired Connector: 5m, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Basic, Bore: 25mm, Port Thread: NPT, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Leadwire or Prewired Connector: 5m, Number: -

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 1 to Less than 3 / 3 to Less than 6 / 6 to Less than 10 / 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Not Provided, Allowable Kinetic

Magnet: Built-in Magnet, Mounting: Basic, Type: Air Cushion, Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewire Connection: 5m, Number: -, X Option:

Magnet: Built-in Magnet, Mounting: Basic, Type: Air Cushion, Bore: 50mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewire Connection: 5m, Number: -, X Option:

Magnet: Built-in Magnet, Mounting: Clevis, Type: Air Cushion, Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewire Connection: 5m, Number: -, X Option

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 for 0.5MPa 31 61 220 390 680 1420 Air consumption cm3 Note 3) Port size M5 Rc 1/8 Weight kg 0.29 0.49 1.2 1.9 3.3 5.7 Note 1) Conductance is molecular flow measured

XLA Series

60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

XLA- ∗ -F7NJ ∗ - ∗ Series

) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XLDV Series

) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46 200 360 660 1350 3000 5150 Air consumption cm3 for 0.5MPa Note 3 Initial pumping 3.5 12 15.5 30 42 54 54 Port size M5:1(SUP),3(EXE) port Weight kg

AC Servo Motor Driver (Pulse input type/Positioning type ）

Malfunction RA1 OFF ON MC MC SK Emergency stop switch Driver Servo amplifier Servo motor (Note 6) MCCB CNP1 MC (Note 10) 1-phase 200 V AC to 240 V AC L1 CNP3 (Note 5) U U L2 Motor V V L3 M W NW P3 (Note 1) (Note 9) P4 CNP2 P+ C (Note 2) D (Note 10) Encoder (Note 3) CN2 L11 Encoder cable L21 (Note 7) Main circuit power supply CN1 Forced stop 2 EM2 CN1 24 V DC (Note 11) (Note 4) Servo-on SON