AR Series Modular Type Regulator

1500 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) 452 Regulator AR10-A to AR40-A Series Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7

RSH

***D-A7l, D-A8l, D-F7l and D-J7l are available as option. 4.3-2 Heavy Duty Stopper Cylinder Series RSH Models Applicable auto switch Construction Action Bore size (mm) Reed switch Solid state switch Rod end configuration Mounting Fixed mounting height D-Y5 D-Y6 D-Y7 Double with spring Single/spring extend Flange 20, 32 50, 63 80 D-Z7 D-Z8 Lever with built-in shock absorber MK/MK2 Specifications

C92

2 (On different faces or same face) 15 130 125 120 95 70 25 75 D-F5NTL 1 10 D-F5W D-J59W D-F5BAL D-F5F D-F5LF 2 (On different faces or same face) 15 130 125 120 90 70 25 75 10 1 1.12-14

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.

RB/RBL/RBQ

According to d = 40, E2 is obtained. Weight equivalent to impact object Me (kg) 0.628 1.10 1.26 1.34 2.04 5.

RB/RBL/RBQ

According to d = 40, E2 is obtained. Weight equivalent to impact object Me (kg) 0.628 1.10 1.26 1.34 2.04 5.

VM

D.

13

Effective area of tubing Effective area of tubing from graph below Tubing O.D. 9 V x 60 Q Adsorption response time T1 = Adsorption response time T2 = 3 x T1 Piping capacity 3.14 4 1 1000 V = D 2 x L x ( l ) T1 : Arrival time to 63% of last vacuum pressure Pv T2 : Arrival time to 95% of last vacuum pressure Pv Q1: Average adsorption flow l/min (ANR) D : Piping diameter (mm) L : Length from

3 Port Solenoid Valve Metal Seal Series VZ200 1

For lead wire length (1000 mm) Solenoid valve: VZ2150-5M0-015 pcs. Connector assembly: DXT170-80-4A-105 pcs. Crimping the Lead Wire and Socket Peel 3.2 to 3.7 mm of the tip of lead wire, enter the core wires neatly into a socket and crimp it with a special crimp tool. Be careful so that the cover of lead wire does not enter into the crimping part.

High-precision Digital Pressure Switch

[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Fieldbus system (CC-Link compliant)

Output: 32 OFF ON ON 8 points for each 8 points for each of A to D of A to D 2.

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

SI Unit for Vacuum Manifold

Fieldbus interface connector BUS OUT/Port2: M12 4 pin socket D-coded (Port type: MDI-X) No. Designation Content 1 RD+ Receive Data + 2 TD+ Transmit Data + 3 RDReceive Data 4 TDTransmit Data BUS IN/Port1: M12 4 pin socket D-coded (Port type: MDI) No. Designation Content 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data Fig. 2-1.

Digital Pressure Switch

(Example: When the value can be displayed down to 0.001 MPa for the product for 0 to 1 Mpa, the resolution is 1/1000) Display resolving power Displayed pressure value can be adjusted within the range of 5%R.D. (5% of displayed value).

AR20-B to AR60-B

1500 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000 5000 0 1000 2000 3000 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow

Fieldbus system (DeviceNet compliant)

(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

ASR

) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

AC Servo Motor Driver (MECHATROLINK-III type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.