Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

IDG

HA AT (G) (B) (D) ID (H) AMG Purge air for dehumidification AFF AM Misc.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

Compact Cylinder with Air Cushion

T1 F E B Joint and mounting bracket (A type, B type) part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

RQ

CU T1 CQS F B E CQM Joint And Mounting Bracket (Type A, Type B) Part No.

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

Brake mechanism added

COM Max. 30 VDC, 50 mA CEU2 OUT4 Load COM U Valve driving output COM Valve BR PNP transistor output Controller: CEU2P U Valve driving output OUT1 Load Valve B COM Max. 30 VDC, 50 mA CEU2P OUT4 Load U COM Valve driving output Valve B However, on the valve output side, the COM of the input circuit and the COM of the output circuit are electrically insulated from each other. 24 VDC 24 VDC E

C95

Cushion ring A 1 6-1 1 6-2 4 u i o !

Air Pilot Operated Series NVSA

DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

MQQ

A B C D E F Part no.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.

Vacuum Pad: Ball Joint Type

Dimensions H B Ball joint type: 10 to 32 (mm) D Model B d H Y ZPNA-M10 M10 x 1 3 14 E ZPNA-M14 M14 x 1 5 19 ZPNA-M8 M8 x 1 3 12 C A B Ball joint type: 40, 50 ZP3 D ZP3E ZP2 E Y ZP2V C A ZP B ZPT ZPR ZPT ZPR (mm) Model B A C D E Y XT661 ZP10F 10 12 6.5 1.5 ZP13F 13 15 3 8.2 7 2 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 25 28 4 10.2 3 ZP32F 32 35 9 ZP40F 40 43 10 13 5 26 ZP50F 50 53 8 14 6 725 ZPT/

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Cushion valve Wear ring r t y u i o !

Heavy Duty Stopper Cylinder

B 23.5 A 7.0 B A 10.5 (13.0) B Bore size 50 63 80 23.5 19.5 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) The values inside ( ) are for the D-A96/A96V.

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 2 13 16 49 16 18 32 35 ZPT 40/50 F-B5-A14 (Without Buffer/Male Thread) M14 x 1 Width across flats 19 M5 x 0.8 5 5 20 D 5 F Width across flats 21 C Y 2.5 A B Dimensions A (mm)

MVGQ

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.