Series CE1

A76H 5V A96 A96V IC V V A72H A73H A72 A73 200V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V Grommet Yes Reed switch Solid state switch V 100V 12V A93 A90 A93V A90V Relay PLC 2 wire A80H A80 A73C A80C A79W F7NV IC No Yes No Yes 5V,12V 100V 24V 24V 12V V V V V Connector IC 5V,12V Diagnostic indication (2 color) Grommet F79 IC 5V,12V 3 wire (NPN) 3 wire

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

P EXH V V V V PE ZQ1 1U1 5 6 Q N E F F KE F F KType Q2, N2 ZQ1 1U-Q2 ZQ1 1U-N2 5 6 A B 0 (With L-type plug connector) Bracket A (Standard) Suction filter Vacuum pressure switch Pilot pressure exhaust (PE) port M3, Atmospheric release Note 4) Supply valve 62.8 2 x 3.2 through (Body mounting hole) Air pressure supply (P) port M5 Note 4) 69.4 76.3 3 20.2 (63.1) Vacuum (V) port (M5) Note 4) SMC

Cylinder with Lock Series CLS

A54 A59W 3-wire (NPN equiv.) 5 V 12 V 5 V, 12 V 100 V Yes IC circuit Relay, PLC 100 V or less No 100 V, 200 V 2-wire 24 V PLC Terminal conduit 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indicator) Solid state auto switches marked with are produced upon receipt of order.

Guide Cylinder Series MGG

Reed switch Solid state switch 2-wire 12 V Connector Relay, PLC Yes Yes Yes Yes Yes No No No 24 V 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V IC circuit 3-wire (NPN equivalent) A96 5 V A93 A90 100 V Grommet

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

Soft Start-up Valve

V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC

Compact Cylinder

Weights Unit: g D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch part no.

0.55

Output circuit Surge voltage 24 V 0 V Polarity protection diode Diode sol.1: Energized 60 V R Internal circuit Internal circuit Surge voltage Red (+) Coil 0 V PWM circuit sol.2: Deenergized 60 V R Surge voltage 24 V 0 V LED Large capacity load: Energized Black () 60 V R Relay There is no S option, since a rectifier prevents surge voltage generation.

45

CC-LINK System Master unit: AJ61BT11 A1SJ61BT11 AJ61QBT11 A1SJ61QBT11 Uni-wire H System Send unit: SD-H2 SYJ No. of output points, 16 points SX No. of output points, 16 points No. of output points, 16 points a) 2-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B

Smooth Cylinder

NPN) Z76 5 V Reed switch Solid state switch IC Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Relay, PLC 100 V, 200 V 2-wire 24 V Diagnostic indication (2-color) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC Grommet 100 V, 200 V 12 V 2-wire 3-wire (NPN) 3-wire (PNP) IC Relay, PLC 5 V, 12 V Diagnostic indication (2-color) 12 V 2-wire 24 V Water

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance

Pilot Operated

A, B, G, H, J, L) (Nil, A, B, G, H, J, L) 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V (D, E, N, P) Note) VXD2130 AC VXD21 4 5 Model VXD22 6 7 VXD23 8 9 DC specification is not available.

Soft Start-up Valve

+ 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC [115

Compact Cylinder with Lock Series CLQ

Eccentricity M W T2 V 32 40 50 63 80 100 Bore size (mm) Joint 1 1.5 2 Eccentricity tolerance 0.5 Backlash J E T1 B 2 x D through Joints are not included with the A or B type mounting brackets.

MLGP

5 @8 B' @9 @0 A' A A' A B !6 !3 #0 40 to 63: Over 100 stroke !6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MLGP

9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

Compact Cylinder

12 V IC circuit Solid state switch Reed switch 12 V 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indication) 24 V Yes Grommet 12 V 5 V, 12 V IC circuit Water resistant (2-color indication) 12 V 5 V 12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) IC circuit IC circuit 100 V Grommet Relay, PLC Yes 2-wire 24 V 5 V, 12

MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

Fieldbus system Analog unit

and twos complement data format Input signal range: 0 to 10 V, 0 to 5 V, 0 to 20 mA Input signal range: 1 to 5 V, 4 to 20 mA AD value Input signal range (a to b) AD value Input signal range (0 to b) Voltage [V] Current [mA] Hexadecimal Voltage [V] Current [mA] Hexadecimal Decimal Decimal number number 1 to 5 V 4 to 20 mA number number 0 to 10 V 0 to 5 V 0 to 20 mA 07FF 2047 5.25 21 07FF

CM2

24 V 100 V, 200 V DIN terminal Relay, PLC Diagnostic indication (2-color indication) B59W Grommet H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 2-wire IC circuit 5 V, 12 V Terminal conduit 12 V Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication