Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

3 q Size r Lead [mm] y Motor option1 LEY16 10 5 2.5 16 25 32 LEY25 12 6 3 LEY32 16 8 4 Without option With motor cover With lock2 Symbol Nil C B A B C 1 When [With lock] is selected, [With motor cover] cannot be selected. 2 For 30 stroke or less of size 16 with [Motor mounting position: Top mounting type or right/left side parallel type], when [With lock] is selected, the motor projects through

Multistage Ejector Series ZL112.212

unit: kPa Supply valve/Release valve combination With supply and release valves With supply valve K1 K2 Output specifications Rated voltage (Applicable only when the vacuum pressure sensor specification is D for digital pressure switch for vacuum) Electrical entry DC specifications 5 6 V S R 24V 12V 6V 5V 3V G H L LN LO M MN MO Lead wire length 0.3 m Grommet Lead wire length 0.6 m N P A B C

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

BP1000

Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld FV4 MV4 TW4 FV6 MV6 TW6 Seat material Material Code Material Viton (Standard) PTFE Kalrez Diaphragm Code Body 316L SS secondary remelt Nozzle 316L SS Hastelloy C-22 No code TF KZ S SH Pressure gauge unit 2) Surface finish Unit psig

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

flow capacity: 4W specification VQZ Lead wire Connector Lead wire length (+) Red A VQD 300mm 600mm 1000mm 2000mm 3000mm Coil Timer circuit Diode 6 10 20 30 LED VZS i1 i2 () Black C i1: Inrush current i2: Holding current VFS Lead wire length of plug connector For the 4W specification (power saver), power consumption at holding is reduced with the above circuit.

Siiiil"Tivrc

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.

BP1000

Connections NPT 1/4 inch 1/4 inch compression Code 4 4T Seat material Code Material Viton (Standard) PTFE Kalrez Material No code TF KZ Body Brass Nozzle Diaphragm Code B S SH Gauge port (Inlete, r) 316 SS 316 SS Pressure gauge 1) 316 SS Hastelloy C-22 Hastelloy C-22 Code psig/bar unit MPa unit Pressure gauge unit 2) No gauge port No code Ports Unit psig/bar MPa Code No pressure gauge (Connections

Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63

Air cylinder 40, 50, 63 10-/1121-/22Series CA2 How to Order Clean series 10 11 Relief type Vacuum suction type Mounting style Basic style Axial foot style Rod side flange style Head side flange style B L F G Bore size (mm) Port thread type Rc NPT G Nil TN TF 10 C D A 2 B 40 150 Y59B 21 C D A 2 B 40 150 Y59B Nil Built-in magnet Number of auto switches No 2 pcs. 1 pc. "n" pcs.

CYP

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

FHG

L-block female threaded companion flange S-block companion flange S-block female threaded companion flange 1/2B, 3/4B, 1B A B C 074 105 149 74 m 105 m 149 m 1 1/4B, 1 1/2B, 2B 2 1/2B, 3B Length below flange neck (T dimension) M Micromesh Element Standard T dimension T dimension when shipped Symbol Length (mm) 310 380 450 520 590 385 485 585 685 560 650 750 850 Port size (Nominal size) Adjustment

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

0 Actuator cable length [m] LEM R Robotic cable (Flexible cable) 1 1.5 A 10 3 3 B 15 5 5 C 20 8 8 Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP12 LEY Cable is shipped assembled. (Programless type) NPN 1P PNP LES Produced upon receipt of order. Refer to the specications Note 5) on page 488.

In-line Air Filter ZFC Series

[C] 0 to 60 0.0 0 10 20 30 40 50 60 Filtration [m] 5 (Filtration efciency 95%) Operating temperature [C] Element replacement differential pressure [MPa] 0.1 (Vacuum pressure 20 kPa) Filtration area [mm2] 140 470 750 1260 Applicable tubing material Nylon, Soft nylon, Polyurethane Weight [g] 2.5 4.5 10.5 20.0 25.0 Internal capacity [cm3] 0.5 1.7 4.5 6.0 7.0 Total length [mm] 45.0 60.5 53.9

Fluid: 0 (Petroleum), Port Size Category: C (2 1/2, 3), Std. T Dimension, mm: 3 (Port 1/2-1: 450, 1 1/4-2: 585, 2 1/2-3: 750), Filtration: 74μm, Port Size: 24 (3), Pressure Indicator: 1 (Differential Pressure Indicator), Connection: 4 (S-block Companion Flange), Air Breather: C (Cap)

Ambient Dryer Series AMG

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.