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Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.

Modular Type Air Filter Series AF

0 !1 Drain q r e w t i u y o !0 !

Parallel Type Air Gripper Series MHZ

FKM MHZAJ2-J6F Si MHZAJ2-J6S 4 Series MHZA2-6/MHZAJ2-6 Parallel Type/Compact Series Dimensions/(mm) Standard Type 1in = 25.4mm MHZA2-6 Double acting/Single acting Basic Type 12 Scale: 100% 5 2-M2 x 0.4 thread depth 4 (mounting thread) 2-M3 x 0.5 through (mounting thread) Prepared hole dia. 2.6 through (mounting hole) 0 -0.1 13.6 4 20 12 20 When closed 8 0 -0.4 When open 12 1 +0.022 0 7H8

ZSE30/ISE30

-color display (Red and green) Sampling cycle: 5 times/s Display PF2 2% F .S. 2 digit (at 25C ambient temperature) 2% F .S. 1 digit (at 25C ambient temperature) Display accuracy IF Light up when output is ON (Green) 2% F .S. or less (based on 25C) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating and stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min

SMC

1 2 3 4 5 6 7 8 9 10 0 Valve operating cycle x 104 10 Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 8 Line B 6 Line C 4 2 0 0 1 2 3 4 5 6 7 8 9 10 Valve operating cycle x 104 Example of air line equipment Example of oil-free air equipment Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

S Couplers Series KK/KK13

0.2 0 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.1 Connected plug and socket Pressure (MPa) 3 S Couplers Series KK How to Order KK 4 S 02 M S Body size With sealant (male thread) 3 4 6 1/8 1/4 1/2 Connection type Type Male thread Female thread With nut fitting Straight with One-touch fitting Elbow with One-touch fitting Bulkhead with One-touch fitting Symbol M F N H L E Socket/Plug designation S P

EXxx-OMU0020CN

General diagnostics 1 . 5-2 General diagnostics 1 Bit 0 System fault 0Diagnostics type 1Diagnostics type 1 Valve-coil(s) short circuit 0() 1() 2 Module(s) error 0 1 3 Changed module layout 0 1 4 US1 Diagnostics 0US1 ON 21.6V 1US1 20.4V 0US2 ON 22.8V 1US2 21.6V 5 US2 Diagnostics OFF 0(US3)ON (22.8V ) 1(US3) 6 US3 Diagnostics (21.6V ) OFF 0(US310)ON (22.8V ) 7 US4 Diagnostics 1(

Pin Clamp Cylinder Series CKQ/CLKQ

3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Solid State Auto Switches

CDA2 B 50 200 X1184 B31J S With built-in special magnet Number of auto switches Cylinder stroke Description 2 pcs. 1 pc.

VXD21/22/23

PA IN PAX Solenoid coil PB Coil: Class B, Class H Rated voltage Model AC Standard Option 100 V, 200 V 48 V, 110 V, 220 V, 240 V Orifice size (mm) Model Port size 10 VXD2130 Rc 1 4, 3 8, 1 2 Rc 3 8, 1 2 Rc 3 4 DC 24 V 12 V 15 20 VXD214 VXD215 VXD226 VXD227 VXD238 VXD239 2 0 Standard Option 2 0 2 0 Rc 1 25 Material 2 0 32A 35 40A 40 2 0 Body Seal Brass/BC6, Stainless steel NBR, EPDM, FKM

With Factory Installed

AR2001/2501/3001/4001 AW200I/3OQI/4001 __ -AC200I/250I/3001/ 4001 Outside diameter: D27.5mm limit indicators ipeci Ica Ions Standard S "f r Model no. GC30-10 GC30-2 Pressure range (MPa kgf/cm2 ) 0 ~ 0 . 2MPa 0 ~ 1 . 0MPa 0~2kgf/cm2 0 ~ 10kgf/cm2 Accuracy 3%F.S.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

Suction Guard (Produced upon receipt of order) FHG Series

A 04 0 0 M 074 FHG9 Port size Suction guard 04 06 08 10 12 16 20 24 1/2B 3/4B 1B Hydraulic fluid 1 1/4B Air breather 0 1 2 Petroleum Water-glycol, Emulsion Phosphoric ester 1 1/2B Nil Air breather Cap 2B C 2 1/2B 3B Connection Port size category Nominal filtration 0 1 2 3 4 5 Companion flange Female threaded companion flange L-block companion flange L-block female threaded companion flange

CRB1/Size: 10, 15, 20, 30

0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10

Electric Actuator Triple Axis P&P Unit

mm or more. 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 13 Electric Actuator/Maintenance Guide 1 Be sure to read before handling.

XM, XY

0) Magnet (Option) Pilot port S (For initial exhaust) Bellows holder (Material: Stainless steel 304) !

PFxx-OMJ0005CN

50 ms0.5 s2 s) 1.5 s 15 V 1 k 420 mA 600 DC24 V 50 5F.S. -54No.PF-OMJ0005CN-I PFM710 PFM725 PFM750 PFM711 ()30 ms 3F.S.() LED 3 7 2 (/) OUT1ON OUT2ON DC24 V10 55 mA IP40 050 () 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) CE(EMC ROHS )ULCSA 110L/min10009.99 L/min 2100L/min100099.9 L/min 3 ()10024 551005009.5 221002003.8 420 1 atm() 0 1 atm() -55No.PF-OMJ0005CN-I

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PRODUCT FEATURES S E R I E S I P 6 0 0 0 / I P 6 1 0 0 I HIGH PERFORMANCE POSITIONER Cross section of the exhaust system. I RESISTANT TO HOSTILE ENVIRONMENTS Employs the combination of the check valve and the labyrinth effect. I EXCEPTIONAL SHOCK AND VIBRATION PERFORMANCE EXH.

Guide Table Series MGF ø40, ø63, ø100 1

Bore size (mm) A B MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 40 63 100 4 0 14.5 0 CX 19.5 0 Dimensions above denote the standard strokes. Adjustment on A dimension is required for intermediate strokes.