Pilot Operated

L Approx. 280 Q L M Approx. 300 G1/2 N f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R (R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5

Table of Contents

7 w e q !1 !0 !6 !2 !3 !

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Stopper Cylinder

0 w q e r t u !

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

100

HNBR/NBR Screws for assembly Steel 12 ZL1 Series How to Order Replacement Parts z How to Order Supply Valve/Release Valve How to Order Lead Wire with Connector Assembly for Supply Valve/Release Valve 1 M Q Z SYJ5 4 5 SY100 30 4 A 6 q w e r t y q w q Type of actuation q Power supply voltage w Lead wire length 1 Normally closed 2 Normally open (Supply valve only) 1 100 VAC 2 200 VAC 3 Other

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

3 q u !0 !2 r y e !5 o !

Modular Type Regulators Series AR

t IN OUT e q r IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.

AW

q q IN OUT IN OUT IN OUT u u r u r t r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

2 CE compliant Nil Q CE marked Note) CE compliant: For DC only. 16 Series ZQ Manifold Ordering Example How to Order ZZQ108-R0B 1 pc. ZQ1000M-K15L-EAG (-Q) 4 pcs. (Stations 1 to 4) ZQ1000M-K1Y5L-EAG (-Q) 4 pcs.

Basic type / Direct mount type Series CY3B/CY3R

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

QA F Q Stroke QB QU QW Built-in One-touch Fittings (mm) Applicable tubing O.D.

energy saving effect

Right Left Rear Front w q Parts List e Part no. Applicable model Weight [kg] No.

Thermo-chiller

Q: Heat generation amount I: Current Users equipment q Derive the heat generation amount from the power consumption.

1.1

[Dustproof filter set] q This dustproof filter is secured with hook-and-loop tape.

15

LEF LEJ How to Order LEL LEJ MF D NY 63 LEM LEY q w LES w Motor type q Size 40 For LEJ40 63 For LEJ63 LEPY LEPS Symbol Type NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T LER LEH LEY -X5 * Component parts vary depending on the motor type.

AZ1000

w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AZ1001S e q FV4 FV4 FV4 w FV4 FV4 FV4 r 2PW 3PW 4PW 2PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

Auto Switch Guide

RS Q G Lead wire Oil resistant vinyl heavy-duty cord, 4, 0.3 mm2, 3 cores (Brown, Black, Blue), 2 cores (Brown, Blue), 0.5 m Note 1) Regarding the common specifications of the solid state switches, refer to page 10-20-7. Note 2) Regarding the lead wire length, refer to page 10-20-7.

MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.

MGP

6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !