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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LY printing OZ 7150SZ Printed in Japan. D-DN

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MV printing MV 16400DN Printed in Japan.

Double acting Double acting 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 With flow rate adjustment PA N.C. B A N.C. Double acting With bypass PA PA N.C. PB B A B A Inch sizes Double acting 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 N.C. Double acting N.C. With flow rate adjustment & bypass PA B A N.C. N.C. With indicator PA Basic size With reducer N.C.

OZ Edition B Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NR printing OZ 7150SZ Printed in Japan. D-DN

This phenomenon occurs earlier if pushing or the high vacuum pressure is used. 27 - Revision history Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 28 -

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: C (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

operating frequency (c.p.m) Mass (g) Effective gripping force per finger (N) Action Model Bore size (mm) External grip: 15 Internal grip : 16 External grip: 31 Internal grip : 36 External grip: 46 Internal grip : 56 External grip: 80 Internal grip : 86 MHK2-12D 12 4 9 13 75 Double acting Single acting MHK2-16D 16 6 14.6 20.6 113 MHK2-20D 20 10 16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-90 kPa), SUP: 10 (One-touch Fitting ø10), VAC: 03 (Screw-in Rc 3/8), EXH: 12 (One-touch Fitting ø12), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 10 (One-touch Fitting ø10), VAC: 03 (Screw-in Rc 3/8), EXH: 12 (One-touch Fitting ø12), Accessories: S (w/Standard Bracket, w/Silencer)

Model: ASQ (Flow Valve), Size: 6 (1/2 Standard), Port Size: 03 (3/8), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 5 (3/8 Standard), Port Size: 03 (3/8), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 03 (3/8), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Nozzle Diameter: ø1.8mm, Vacuum Pressure: -48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A, SUP: One-touch Fitting ø10, VAC: Screw-in Rc 3/8, EXH: One-touch Fitting ø12, Accessories: w/Standard Bracket, w/Silencer