AFF

Description Material AFF4B AFF8B AFF22B AFF37B AFF75B AFF2B Element assembly Cotton paper, Others AFF-EL11B AFF-EL4B AFF-EL8B AFF-EL22B AFF-EL37B AFF-EL75B AFF-EL2B r Element assembly: With gasket and O-ring AFF75A to 220A (OUT side) Guage port N-5 Drain N-4 N-6 Gauge port (IN side) Component Parts No. q w Description SGP-E, SS400 Material Note Case Cover SS400 Replacement Parts Drain (N

CG1

HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) 30 24.5 27 27.5 29 24 27 25.5 27.5 20 30 27 27 27.5 29 24 29.5 25.5 30 25 31 30.5 28 28.5 30 25 33 26.5 33.5 32 35.5 35 32.5 33 34.5 29.5 37.5 31 38 40 43 40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5 40 40.5 42 37 50 38.5

Digital Flow Switches Series PF2A

equipment such as a voltmeter.

AMP

CAT.ES13-7 A Exhaust Cleaner for Clean Rooms Series AMP An exhaust cleaner that can be used inside a clean room. Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the operating conditions.)

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

Shuttle Valve/AND Valve with One-Touch Fittings

OR circuit The cylinder operates if either "A" or "B" is ON.

Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Micro-Mist Separator with Prefilter Series AMH

AMH550 AMH150 I Air pressure 0.3MPa ",0.06 '" 0.06 a. ::;; Inlet air pressure 0.3MPa r-a. /;57o.7MPa ::;; ~ / // 0.5MPa ~ ./' 0.7MPa a. ~ 0.04 ~O.O4 VI ~ ~ a. 0.3MPa Q; V ~ 8 002 ~ V;.;.x.fIow Ii~::---X 0.7MPa 8 002 ax fIoW "l . . e ~ L . __ 0.5MPa --L ___ -. _ -'0.7M,a "" ---:=. . ~!"}.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Thread type EXH port type Nil Rc Valve stations N NPT 1 Common EXH Bottom Side P Side Side A E T NPTF Side Side 1 0 G F Option 05 5 stations 10 10 stations Dimensions 65 (89.5) [68] 2-7 91 (115.5) [94] Mounting hole n-Rc 1 4 4-Rc 3 8 ( ): DC [ ]: AC, with indicator light n L L1 L2 2 87 100 3 125 138 4 163 176 5 201 214 6 239 252 7 277 290 8 315 328 9 353 366 10 391 404 L1 = 38n + 11

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Winding direction Port size Knob lifting force M5 10-32/UNF 1 to 1.5 N Sealant tape Expose approx. 1 thread 1/8, 1/4, 3/8, 1/2 3.5 to 4 N 4. Do not rotate the product by the indicator part. Use a wrench for mounting the product. Otherwise, it may cause damage to the product. 601

Stainless Steel One-touch Fittings Series KG

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

VXA21/22

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Universal Type/Metric Size Applicable tubing O.D. d H D1 (Hexagon width across flats) M L3 A L4 L5 D3 D2 L1 Connecting thread T L2 Uni thread H D1 D2 L1 L2 L5 A Max. Min. Max. Min.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 04 06 08 10 12 4 6 8 10 12 Made to Order Refer to page 612 for details.

48

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

α PneuAlpha HARDWARE MANUAL

When wiring AC supplies the Live cable should be connected to the L terminal and the Neutral cable should be connected to the N terminal. Do NOT connect the Live wire to the N terminal, the user might receive a dangerous shock on powerup.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer