MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

MQQ

When using in the circuit in which the piston is actuated by the external force, such as pressing force or tension control, stick-slip phenomenon may occur and lead to unstable sliding resistance when displacement rate is 0.05 mm or less. J D-X 9.

100

Setting is ZSE10 complete. ZL3/ZL6 1 2 3 Push Push Use the or button to Setting is complete. adjust to the set value.

Rotary Cylinder Series MRQ

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 No. $0 $1 $2 $3 $4 $5 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 Description Material Stainless steel Stainless steel Stainless steel Stainless steel Steel wire Steel wire Steel wire Stainless steel Steel wire Steel wire Steel wire Steel wire Steel wire Steel wire Bearing steel Bearing steel Bearing steel Bearing steel Bearing steel

Suction Guard (Produced upon receipt of order) FHG Series

9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7 5.1 5.1 5.0 10.3 10.3 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1

Compact Cylinder with Air Cushion and Lock Series RLQ

Refer to 7 and 9 below when the kinetic energy of the workpiece is absorbed at the cylinder end or eccentric load is applied. 2. Do not use for intermediate cylinder stops while the cylinder is operating. This cylinder is designed for locking against inadvertent movement from a stationary condition.

Table of Contents

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7.5 + Stroke 2-2.8 through 2-2.8 through 5 RQ 2.5 10 2.5 Single acting MU 3 13 + Stroke 18.5 + Stroke D-X 20Rod end male thread Data Width across flats 4 M2 x 0.4 M2 x 0.4 2 4.6 1.6 4 1.6 6 7 2.5 12.5 Rod end nut part no. : NTJ-004 7-2-9 9 Series CUJ Note) The angular position of the width across

Electric Slide Table / High Precision Type 《 AC servo motor 》

If it is combined with a different set of parameters, failure can result. 2.

Compact Cylinder

Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Power supply Internal Load voltage at ON = voltage voltage drop x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Example: Power supply is 24 VDC. Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.

Sine Rodless Cylinder Series REBR Direct Mount Type

9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Air Slide Table Series MXW

0.036 0 depth 9 MXW25 7.4 M6 x 1 18.5 5H9 + 0.030 0 depth 4.5 MXW8 8 2.1 M4 x 0.7 5H9 + 0.030 0 depth 4.5 MXW12 10 4.4 M5 x 0.8 2. 0.02 mm or less of flatness is recommended for the body mounting surface.

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

Multi-channel Digital Sensor Monitor ( compatible)

System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%. "HHH" is displayed. 6 (1) Reset applied pressure to a level within the set pressure range. (1) Check if the pressure exceeds the upper limit of the set pressure range.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

XM, XY

9-1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

IP8001 Series

), non-alarm mode(oFF), and change the set value if alarm 2 mode is selected.

Series IDG

Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

ML2B

9 !8 !7 !1 r #6 @3 #9 @7 y u t !5 #8 #9 @7 w !6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

High Power Cylinder Series RHC

Note 2) Contact P/A if a stroke greater than the maximum stroke is desired.

Air Slide Table Series MXS

2) Option R is not available with the MXS6 series.