Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

MY1

Switch Specifications Auto switch weights Unit: g (oz) Lead wire length 3m 31 (1.09) 55 (1.94) 49 (1.73) Model Lead wire length 0.5m 7 (0.25) 10 (0.35) 9 (0.32) D-Z7m (with indicator light) D-Z73 D-Z76 D-Z80 D-Z73 D-Z76 Auto switch part no.

F

Applicable Model D L A Fitting Size d Inch 3.2(1/8) KQP-01 5 31.5 16 Applicable Model D L A Fitting Size d mm 3.2 KQP-23 3.2 31.5 16 4(5/32) KQP-03 6 32 16 4 KQP-04 6 32 16 4.8(3/16) KQP-05 6.8 34 17.5 6 KQP-06 8 35 18 6.3(1/4) KQP-07 8.5 35 18 8 KQP-08 10 39 20.5 8(5/16) KQP-09 10 39 20.5 10 KQP-10 12 43 22 9.5(3/8) KQP-11 11.5 43 22 12 KQP-12 14 46 24 12.7(1/2) KQP-13 15 46 24 16 KQP-14

1

/C8 D-H7 A B 11.5 8.5 16 Auto switch D-C7/C8, D-H7 D-B5/B6 D-G5/K5 A 12 14.5 B 24.5 Auto switch D-B5/B6, D-G5/K5 D-B7/B8 D-G7/K7 8.5 A 14.5 B 11 Auto switch D-B7/B8, D-G7/K7 Auto Switch Mounting Position D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C Auto switch model D-C7/C8 D-C73C D-C80C D-G5 D-K5 D-G5NYL D-B59W D-H7 D-H7C D-H7W D-H79F D-H7BAL Bore size (mm

Electric Actuator/Slider Type

(RedGreenRed) Auto switch model D-M9NW D-M9NWV D-M9PW D-M9PWV D-M9BW D-M9BWV Electrical entry In-line Perpendicular In-line Perpendicular In-line Perpendicular Wiring type 3-wire 2-wire Output type NPN PNP Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to

ZP

Basic Pad Dimensions/Models Single unit 10 to 40 w q ZP D N 10 D Model A B C D E Y q Pad dia.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Auto switch model Bore size (mm) Operating Range 100 20 25 32 40 50 63 80 D-C7/C80 D-C73C/C80C D-B5/B64 11 10 10 9 10 8 11 17 10 14 10 14 9 14 10 13 8 13 11 16 11 18 D-B59W D-H7/H7W D-H7NF/H7BAL 6.5 6 5 4.5 4 4 D-H7C 10.5 9.5 10 9 8.5 7 D-G5/G5W/G59F D-G5BAL/K59/K59W 7 6.5 D-G5NBL D-G5NTL 7 50 6.5 45 6.5 45 6 45 5 45 4.5 40 4 40 4 35 Since this is a guideline including hysteresis,

ZP

(Female thread) 63 80 ZPT HB-B (Female thread) 100 125 70 Width across flat 60 4 x M5 x 10 G G E F 11 Width across flat 37 45 4 x M4 x 8 E 10 F Y Y 8 10 34 40 C C A A B B D D Dimensions A Dimensions A B C D E F G Y Model ZPT63HB-B8 ZPT63HB-B10 ZPT63HB-B12 ZPT63HB-B16 ZPT80HB-B8 ZPT80HB-B10 ZPT80HB-B12 ZPT80HB-B16 B C D E F G Y Model ZPT100HB-B12 ZPT100HB-B16 ZPT125HB-B12 ZPT125HB-B16 M8 x

REA/REB

D-Y7 Auto switch model Bore size (mm) D-A9 D-F9 D-Z7 D-Z8 D-Y7W 7 13 10 A B 5 8 15 4 6 20 9 25 7 9 32 6 11 40 6 Note 1) Switches cannot be mounted in some cases.

CY1

D-F7LF Note 2) D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-F7W/J79W D-F7WV D-F7LF Note 2) D-A73/A80 D-A73/A80 D-F7NTL D-F7NTL D-F79F D-F7BAL D-F79F D-F7BAL Bore size (mm) 6 27.5 28 40.5 40 32 36 33 35 10 35 35.5 45 44.5 39.5 40.5 40.5 39.5 15 34.5 35 62.5 62 39 58 40 57 20 64 64.5 50 49.5 68.5 45.5 69.5 44.5 25 44 44.5 71 70.5 48.5

Table of Contents

Applicable tubing O.D. d AK ASS ASR ASF L4 A Note) M1 Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

ZP

4 2 2.6 4.6 1.2 0.3 7 3.5 4.3 7.8 1.8 0.5 10 4 5 11 2 0.8 ZPT3507U ZPT4010U b c d e Y Dimensions of D, E, G are the same.

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

C76

Same side Different sides Same side Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

C76

Same side Same side Different sides Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 50 + 45(n 2) 15 ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 65 65 + 50(n 2) 15 D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

VFS

P D Nil D side mounting None 01T, 10 1 2 Rc Rc Rc M Mixed U 01C, 01F 3 4 3 4 U side mounting For bottom ported, Rc is only available.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)