Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 #6 !0 yoiu@2%0%1q%3e !6!7!8#8!9@0 !3 CX MY2C16 @9 D%6 -X !4 #1@3@9 !5@8 @7 %5!2%4$2$4$5 @4 #0 Section A-A' 20A Data A' $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. Description Cam follower cap Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin No.

MU

4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (17.5) Hs A 5 (7.5) 5 (7.5) 5.5 (10.5) 7 (12) 7.5 (12.5) A 5 (7.5) 5 (7.5) 0 (4) 1 (6) 1.5 (6.5) A 2 (4.5) 2 (4.5) 2.5 (7.5) 4 (9) 4.5 (9.5) A Hs Hs Hs Hs Hs Hs CU 25 32 33 39 35.5 37.5 34.5 CQS 32 39 40 46 42.5 44.5 41.5 CQM 0.5 (5.5) 2 (7) 2.5 (7.5) 40 56.5 47 48 54 50.5 52.5 49.5 CQ2 50 66 56 57

MU

4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (17.5) Hs A 5 (7.5) 5 (7.5) 5.5 (10.5) 7 (12) 7.5 (12.5) A 5 (7.5) 5 (7.5) 0 (4) 1 (6) 1.5 (6.5) A 2 (4.5) 2 (4.5) 2.5 (7.5) 4 (9) 4.5 (9.5) A Hs Hs Hs Hs Hs Hs CU 25 32 33 39 35.5 37.5 34.5 CQS 32 39 40 46 42.5 44.5 41.5 CQM 0.5 (5.5) 2 (7) 2.5 (7.5) 40 56.5 47 48 54 50.5 52.5 49.5 CQ2 50 Courtesy

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

Non-contact Gripper

P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!

Check Valve Series AK

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

IZS30_eng

Intermediate bracket A. Tap M5 thread on the brackets mounting positions at the installation side, and fix the ionizer body and brackets with M5 threads. M5 tap M5 threads 4. Adjust angle of the ionizer body to ensure proper static charge elimination, and fix it with detent threads (M5) of brackets.

Compact Guide Cylinder

R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported

Compact Cylinder/Guide Rod Type Series CQM

5.5 6 10 11 12 16 14 16.5 19.5 24 B 4.5 4 7.5 9.5 9 11.5 14.5 17.5 22 27 W 5.5 6 2.5 0.5 1 1.5 4.5 7.5 12 17 A 5.5 6 10 11 12 16 14 16.5 19.5 24 B 4.5 4 7.5 9.5 9 11.5 14.5 17.5 22 27 W 7.5 8 4.5 2.5 3 0.5 2.5 5.5 10 15 A 12 16 20 25 32 40 50 63 80 100 12 16 20 25 32 40 50 63 80 100 (4) (4.5) (1) (1) (0.5) (3) (6) (9) (13.5) (18.5) 1.5 2 6 7 8 12 10 12.5 15.5 20 Note 1) ( ): For D-A93 type

Compact Cylinder

D-M9WV 6 6 7 7.5 D-A9, D-A9V 9.5 9.5 9.5 11.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

KC

after R thread installation. 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 6 6.8 6.8 19 Width across flats 8 14 K 21.5 13.1 8 16.2 M5 x 0.8 17 Applicable tubing M 24 20.4 10 25.6 17 19 22 H 25.5 30.4 12 35.4 D MS Connection thread (With sealant) Male Elbow: KCL T H (width across flats) Applicable A M Effective area (mm 2) Nylon Urethane 1.9 1.9 6 11 7 13 21 16 24 37 29 38 63 81 Connection

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

VKF300

Proper tightening torque Nm {kgfcm} Tightening torque for piping Connection threads M5 Rc(PT) 1/8 1.5 to 2 {15 to 20} 7 to 9 {71 to 92} Reference: Tightening into the M5 fitting threads After tightening by hand, tighten about 1/6 of a turn further using a tightening tool.

Rotary Table/Vane Style Series MSU

MSUB7 (Single vane/Double vane) MSUB7-S/D Top ported: MSUB7-SE A port B port 4 x M4 x 0.7 depth 7 2 x M5 x 0.8 2 x 5.5 through Single vane 2 x M5 x 0.8 depth 10 Long groove depth 5 (Positioning pin hole) 2 x 5.5 through 3 x 4H9 depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2 x 5.5 through A port B port 2 x M5 x 0.8 2 x M5 x 0.8 depth 10 Chamfer Chamfer (Single vane

10

As a result, the fingers could become loosened and adversely affect the service life of the unit. R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

EX510

Thread piping 2 4 6 M3 M5 SJ2000 SJ3000 0.36 0.56 25 32 SZ Port size for A, B ports Applicable cylinder size (reference) Sonic conductance: C [dm3/(sbar)] (representative value) Series Piping with one-touch fittings Metric size Inch size Thread piping 4 6 5/32" 1/4" M5 SZ3000 0.77 32 SY Port size for A, B ports Applicable cylinder size (reference) Sonic conductance: C [dm3/(sbar)] (representative

VZ3000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.