F

20 4.5 40 30 5 23 11.5 17 (N)AS2000-02 1/4, 3/8 61 68 26 5.5 56 45.5 5.25 25 13.2 20.6 (N)AS3000-02, 03 Courtesy of Steven Engineering, Inc. !

KR

KGD06-M5 KGD06-01 28.5 26 29 4.3 4.3 13 1 8 17 31.5 6 9.9 20.5 12.8 1 4 KGD06-02 32.5 33 17 14 13.9 11.0 21 3 8 KGD06-03 34.5 34.5 34 1 8 1 4 KGD08-01 KGD08-02 37 38 33.5 36.5 Connection thread 26 23.5 8 17 15.2 18.5 26.3 18.2 11.1 3 8 KGD08-03 37.5 38.5 35 1 4 3 8 KGD10-02 KGD10-03 43 43.5 39.5 40.5 39 19 2-applicable tubing 10 40 21 12.8 40.8 29.0 18.5 26.5 1 2 KGD10-04 44 45 62 55 56

PSE100

Be aware that the output circuit is not active immediately after the power is connected. 3.1-12 PSE100 Dimensions A: Panel mount 56 l50 Gasket (Accessory) 7.4 l48 PRESSURE SWITCH 10 8 l 45 A Panel mount adaptor (Accessory) 55 11.4 Cover for display (Optional) 62 4 X 7.5 (= 30) 6.5 7.5 10-M3 2-M3 X 8L 30 View A Cutout dimensions for panel mount 65 or more 45 +0.6 0 +0.6 0 45 +0.6 0 N pieces

ARJ1020F

6 t Zinc chromated w Electroless nickel plated Accessory Black zinc chromated Accessory IN 14-4-12 10 Miniature Regulator Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 F.R.L. 31 AV 56 56 AU 35 AF 32 22 M12 x 1 Panel cutout dimensions 12.5/Panel thickness: 4 or less AR 19 2 27 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-

Booster Regulator Series VBA1110 to 4200 1

mounting hole Silencer (Option) O EXH port: 1 position AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F EXH port: 1 position D E IR A 300 404 B 126.5 167 C 53 96 D 73 116 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15 L M Rc 1/16 Rc 1/8 O 39 56

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Y N LQ2H2A-F LQ2H2B-F LQ2H2C-F LQ2H2D-F LQ2H2E-F LQ2H2F-F LQ2H3A-F LQ2H3B-F LQ2H3C-F LQ2H3D-F LQ2H4A-F LQ2H4B-F LQ2H4C-F LQ2H4D-F LQ2H5A-F LQ2H5B-F LQ2H5C-F LQ2H5D-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 39.2 19.9 19 16 18 1/4" 21.5 44.2 43.7 46 45.5 52 51 57 56 63.5 64.5 65 66 1/4" 21.5 26.2 22 24 24 3/8" 25 3/8" 25 21 33.1

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

VNC

2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1 2 Flange 40F Electrical entry/With light/surge voltage suppressor 50A Nil Air operated 2 50 (33) 7 GS Grommet with surge voltage suppressor G Grommet 2B Flange 50F E Grommet terminal 2 B 1 2 Flange 65 (45) 8 65F Valve size 1 EZ Grommet terminal with light/surge voltage suppressor T Conduit terminal 3B Flange 80F 80 (56

VXD21/22/23

52 56 66 63 80 90 3 8 1 2 32.5 118 (136) 17.5 23 39 45.5 3 4 VXD2150 VXD2260 1 VXD2152 VXD2262 36.5 133 (150) 20 25.5 41.5 49.5 ( ): N.O. 17-3-40 9 Series VXD21/22/23 Pilot Operated 2 Port Solenoid Valve For Air, Gas, Water and Oil The VX series will be revised shortly.

V

W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section Air Preparation Accessories n 1 2 3 4 5 6 7 8 9 10 L1 28 44 60 76 92 108 124 140 156 172 L2 40 56

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

VHK

62.2 26.2 36 18.7 31 58 17 9.7 7.2 VHKl-02S-06F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 VHKl-02S-08F VHKl-02S-10F 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-02S-12F VHKl-03S-06F 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56

VQC

KG RKT5-56 Input connector: M12, 5 pins (receptacle) Cable side connector example: OMRON Corporation XS2G 2-input block (EX250-IE1) 4-input block (EX250-IE2) Function Description No. Function Description No. Drain/Shield Drain 1 (+) Sensor power supply SW+ 1 3 1 2 2 (+) Circuit power supply V+ 2 5 2 Open N.C.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

R2 5 3 (11) VQ4 8.5 PE port 16.5 16.5 2-Rc(PT)1/8 P(SUP)port 4-Rc(PT)1/8 R1,R2(EXH) port VQZ (23.5) 47 VQD DIN connector (Y) L plug connector (L) 300 (Lead wire length) 148 (3 Position)<150> 135 (Double) <137> 97.5 (Single) <98.5> 67.5 <68.5> VZS Indicator light VFS 155.5 (3 Position) MAX.10 142.5 (Double) Pg.7 VS 101.5 (Single) 71.5 Indicator light Applicable cord O.D. 3.5 to 7 52.5 <56

VY511, VYU5

SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR. READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39

ZCUK

(mm) Type 2 4 6 8 10 13 16 20 25 32 40 50 GS Flat with ribs Flat Deep Bellows 56 3 Series ZCUK Applicable pad style Model Rod end shape Tubing system in vacuum side Refer to next page for details.

Multistage Ejector Series ZL112/212 1

6 13-7-7 8 Series ZL Dimensions: Series ZL112 (Without valve) 2-5.4 Mounting hole Label 50 117 Exhaust port Standard ZL112 P 20 V 4.5 166 56 Exhaust port Rc 1/2 35 Port exhaust ZL112P P V 14 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-5.4 Mounting hole Vacuum

ZX

(PD port) Common EXH port Pitch = 21 M5 (or M6) Individual vacuum supply port (PV port) Common vacuum supply port (PV port) Common supply port for vacuum switch valve (PS port) Stations (mm) 8 7 180 192 197 6 159 171 176 5 138 150 155 4 117 129 134 3 96 108 113 2 75 87 92 1 54 66 71 Symbol L1 33 45 50 L2 L3 13-2-56 56 Vacuum Module: Vacuum Pump System Series ZX (In the case of individual

NAIV

(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87

-fl Seies

POTiS J inch(mm) n: stations L t 4 5 7 I 'to Equation L1=1.lOxn+1.85 (L r= 28 x n +47) Lr:1.1Oxn+2,2O (L,:28 x n +56) Lr (75) 4.06 (r03) 5.16 (131) 6,26 fl59) 7.36 (187) 8.46 (2|5) 9.57 \243) 10.67 (271) 11.77 (299) 12.87 (327) Lr 3.31 (84) 4.41 (112) (140) 6.61 (r68) 7.72 (196) s.a2 \224) 9.92 (252) 1t.02 (280) 12.13 (308) 13.23 (336) Series NVFRz000:Base Mounted Tlzpe Manifold Ptug-in Type