MIW/MIS

D-F9NW, F9NWV DC (+) Brown Main switch circuit Auto Switch Weights OUT Black Unit : g Model D-F9NW(V) D-F9PW(V) D-F9BW(V) DC () Blue 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown Auto Switch Dimensions Main switch circuit OUT Black D-F9W Mounting screw M2.5 x 4l Slotted screw DC () Blue Indicator light 2 2.7 D-F9BW, F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main switch

MQQ

3.2 52 46 66 10.7 20 5.8 Y Y X X LG 4-LD LX LT 26 3.2 57 57 71 11.2 25 5.8 LS + Stroke 32.5 3.2 64 64 78 11.2 28 7 LZ A + Stroke Front flange type/MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 to 40 49.5 31.5 4.5 5.5 30 45 10 FX FT 10 to 60 54 34 6.6 8 39 48 16 FZ L B + Stroke 10 to 60 57.5 37.5 6.6 8 42 52 20 A + Stroke 2-FD 10 to 50,75,100 64 42 5.5 8 48 56

MRQ

Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

MXW

160 40 40 40 L Data 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread depth 12 (N 1) x H G Bottom through-hole 5.1 GG HH H 7 NN-M6 x 1 thread depth 12 depth 5.5 6H9 +0.030 0 Bottom through-hole 5.1 F E 6H9 +0.030 depth 5.5 0 (mm) H HH Z NN N L K J GG G F E Model MXW20-150 48 412 1 6 66 41 169 29 101 216 113 MXW20-175 52 462 1 6 91 66 194 50.5 128.5 237 140 MXW20-200 48 512 1 7 116 91 219 56

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

For details, refer to page 2-3-56. Note 2) Can be changed to side ported configuration. Note 3) An optional specification for special wiring is available to increase the maximum number of stations. Refer to page 2-3-54 for details. Note 4) Except valves. For valve weight, refer to page 2-3-10.

VHK

-12F VHK-03S-06F VHK-03S-08F VHK-03S-10F VHK-03S-12F VHK-04S-10F VHK-04S-12F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Be sure to take measures to prevent the area around the product from becoming filled with an explosive gas, when using an explosive fluid. 56

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 39 Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5 (For mounting) 13 36.9 (DIN 38.1) 21.5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 24 Series SYJ500 Type

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

46 66 10.7 5.8 LS + Stroke LX LZ 25 26 3.2 57 57 71 11.2 5.8 A + Stroke 30 32.5 3.2 64 64 78 11.2 7 40 27 3.2 79 78 95 14.7 8 Front flange type: MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56

End Lock Cylinder Series CBG1

With Mounting Brackets Axial foot type/CBG1L Foot type (mm) With rear lock/H With front lock/R With double locksW Bore size (mm) ZZ LS ZZ LS LS ZZ With rod boot With rod boot Without rod boot Without rod boot With rod boot Without rod boot 142 + l 141 (149) + l 153 + l 20 57 68 121 (129) 122 56 (64) 133 149.5 + l 148.5 (156.5) + l 160.5 + l 25 57 68 126.5 (134.5) 127.5 56 (64) 138.5 149.5

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Escapements Series MIW/MIS

D-F9NW, F9NWV DC (+) Brown Main switch circuit Auto Switch Weights OUT Black Unit : g Model D-F9NW(V) D-F9PW(V) D-F9BW(V) DC () Blue 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown Main switch circuit Auto Switch Dimensions OUT Black D-F9W Mounting screw M2.5 x 4l Slotted screw DC () Blue Indicator light 2.7 2 D-F9BW, F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main switch

Stainless Steel One-touch Fittings Series KG

(mm) Effective orifice(mm 2) Weight (g) Nylon Urethane L1 M1 L2 Q D2 M2 D1 Part No. 4 6 KGT04-06 KGT06-08 16.4 16.4 7.1 6.5 17 18.5 18.5 20.9 12.8 15.2 4.5 5.3 21 22 18 20 10.4 12.8 19.5 22.5 16 17 56 44.5 36 27.2 9 6 8 6 10 8 KGT08-10 15.2 18.5 26.5 28.5 23 26.5 6 6.8 18.5 21 14 21 10 12 KGT10-12 Male run tee: KGY Effective orifice(mm 2) A Applicable tube O.D.

Turntable Cylinder Series MGT

M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

2-UA, thread depth UB (mounting threads) Q 4.5 20 20 FX FY FZ (Open DO) (Closed DC) WA, depth 2 4-M4 x 0.7, thread depth 8 Attachment mounting threads CB CA M5 x 0.8 (finger opening port) Open EO Closed EC 9 L J M5 x 0.8 (finger closing port) G I 2 (mm) RB 25 28 I 6 7 Model MHS2-32D MHS2-40D Q 11 12 RA 38 44 SA 4.5 5.5 FX 23 26.5 G 30.5 32 AA 44 47 NA 14 16 J 20 21 AB 41 44 L 2H9 3H9 B 56

Modular Type Regulator Series AR

pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56

Miniature Regulator Series ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

e-Rodless Actuator

D-F9NW/F9NWV DC (+) Brown Switch main circuit Switch main circuit OUT Black Weight Table Unit: g DC () Blue D-F9NW(V) D-F9PW(V) D-F9BW(V) Auto switch part no. 0.5 7 7 7 Lead wire length (m) 3 34 34 32 D-F9PW/F9PWV 5 56 56 52 DC (+) Brown Dimensions Unit: mm OUT Black D-F9W Mounting screw M2.5 x 4l Slotted set screw DC () Blue Indicator light 2.7 2 D-F9BW/F9BWV 22 2.8 2.6 OUT (+) Brown 4 Switch