Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

E-P HYREG

10 k 67 k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indication) Relay, PLC Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire

reduces flow setting time

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG R NPT Note 1) Sealant AS3ll1FSl-l02

Auto Switch Guide

C76 Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL C85 C95 CP95 Auto Switch Mounting Bracket Part No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

PCB (With surge voltage suppressor) r Seal material t Orifice diameter and port size V V V Symbol Seal material N NBR F FKM E EPDM Symbol Orifice diameter [mm] Port size Size 10 20 30 101 1.6 1/8 V 201 2.4 1/8 V 301 3.2 1/8 V 302 1/4 V 303 3/8 V 402 4.0 1/4 V V 403 3/8 V V 502 5.6 1/4 V V 503 3/8 V V 702 7.1 1/4 V V 703 3/8 V V CS Conduit (With surge voltage suppressor)

MXW

F9PV 3-wire (PNP) F9B F9BV Relay, PLC 2-wire 12 V 24 V Yes Grommet F9NW F9NWV 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Solid state switches marked with are produced upon receipt of order.

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

Modular F.R.L. Unit

+ AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-port valve for V residual pressure AC20B to 50B AF + AR + [V] release AC20C to 40C AF + AFM + AR + [V] Accessories AC20D to

MHZ2/MHZJ2

Black] Indicator light/Display method 23 2 Color Indicator Type Solid State Switches /Direct Mounting Type D-F9NW(V), D-F9PW(V), D-F9BW(V) Auto Switch Specifications Grommet D-F9W, D-F9 WV (with indicator light) D-F9NW Auto switch part no.

Stopper Cylinder

switch 2-wire 24 V 12 V 100 V A93V*2 A93 Relay, PLC No 5 V,12 V 100 V or less A90V A90 IC circuit *1 Water-resistant type auto switches can be mounted on the above models, but SMC cannot guarantee water resistance.

A

D I M E N S I O N S S E R I E S NARJ 04 4mm 06 6mm Japanese N North American M5 M5X0.8 Panel Mount Dimension Model A B C D E F G H J NARJ1020F-M5-04 21 10.4 4 M5X0.8 6 10.6 3.5 15.5 50 NARJ1020F-M5-06 22 12.8 6 Courtesy of Steven Engineering, Inc. !

CG5-S

(mm) Connection threads Connection threads Model Model KGU04-M5 M5 x 0.8 M5 x 0.8 KGT04-M5 4 4 -01 R 1/8 R 1/8 -01 -02 R 1/4 R 1/4 -02 KGU06-M5 M5 x 0.8 KGT06-M5 M5 x 0.8 -01 R 1/8 R 1/8 -01 6 <M5 type> 6 <M5 type> -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU08-01 R 1/8 R 1/8 KGT08-01 8 8 -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU10-02 R 1/4 R 1/8 KGT10-01 10 -03 R 3/8 R 1/4 -02

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

Vacuum Pad

x 0.8 V V A12 M12 x 1.75 V V AG1 G1/8 V V AG2 G1/4 V V AG3 G3/8 V V Male thread Pad material Symbol Material B5 M5 x 0.8 V V B8 M8 x 1.25 V V Female thread SF Silicone rubber Complies with the FDA (USA Food and Drug Administration) 21CFR177.2600 elution test.

Auto Switch Guide

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 9-15-36 37 Solid State Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

E-P HYREG ® Series VY1 1

1 to 5 V 1 24 V 2 3 5 6 7 8 4 to 20 mA 0 to 20 mA 1 to 5 V 0 to 10 V 4 to 20 mA 0 to 20 mA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01

C85

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV 3-wire (PNP) Grommet J79 H7B F7BV 12 V 2-wire

CY1

x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5 103 TW 65 70 75 S 161 169 209 PP 21 23 27 PB 62 65 75 PA 50 50 65