High Vacuum Angle Valve

100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

JXCx-OMT0001CN

) ) 1 2 (+)(-) 14 M PWR 1 2 15 ENC3 (16 ) 3 16 MOT3 (6 ) 17 ENC4 (16 ) 4 18 MOT4 (6 ) ) (+) 3 (+) 3 (+) 19 CI 3 4 4 (+)4 (+) ) 3 4 (+)(-) 20 M PWR 3 4 21 P1, P2 EtherNet/IP EtherNet -28No.JXC-OMT0001CN-C ) 6.

Digital Flow Switches, Series PF2A, Series PF2W

times each Impact resistance Noise resistance 1000Vp-p, Pulse width 1s, Rise time 1ns Weight Note 3) 410g 470g 650g 1,100g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W3.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

4 4 3 3 For the applicable auto switch model, refer to the table below.

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through

Thermo-chiller

3 w Parts List (170) No.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 5400 Electronic gear denominator *3.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

3 !4 !5 !6 !7 !8 !

Environment

2 Controller/Driver mounting Nil Without cable (Without communication plug connector)*3 1 1.5 3 3*2 5 5*2 S Straight type communication plug connector*3 T T-branch type communication plug connector*3 Nil Screw mounting D DIN rail mounting* 11LEJS * DIN rail is not included.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

Speed Controller with One-touch Fittings

L5 L6 L7 L8 M1 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 12 9.3 12 13.2 15.2 13.2 15.2 18.5 18.5 21.7 36 37 39.5 40.7 42.6 53.4 57.2 59 65 69.8 76.9 81.3 4.5 5.2 6.1 5.2 6.5 6.9 8 7.4 8.2 9.8 10.3 11.3 11.2 11.9 12.8 12.3 13.6 16.5 17.6 19.3 20.1 21.7 22.7 23.7 23.8 24.5 25.5 28.9 30.2 33.4 34.5 38.6 39.4 41 51.6 52.6 21 21.7 22.7 25.4 26.7 28.4 29.5 33.6 34.4

EX600-DX_DY_DM_eng

1 FE - 3 2 1 0 3 2 1 1 0 25 24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10

CQS

3 20 20 CQSB20-S-PS CQSB20-T-PS 25 25 CQSB25-S-PS CQSB25-T-PS Seal kit includes !3. Order the seal kit, based on each bore size. Seal kit includes !2, !3, !4.

LEF-OM002xx

:YES ALARM JOG SETTING Press the (3)SET key RTN ORIG:Start Select JOG Method of ending JOG Drive Press the (3)SET key Press the (5)MENU key JOG 1 RTN ORIG Done JOG:Move Posn 123.45mm AX IS. TEST Check 1 EXT Inp ON DATA MONITOR AX IS. OK ALARM JOG SETTING Press the (3)SET key Press the (3)SET key 3.

Thermo-chiller/Rack Mount Type

3 !4 i !5 !9 !6 !7 @0 @1 !8 No.