3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

E-P HYREG ® Series VY1 1

-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated)

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

VM

Toggle lever VM220-02-08 VM230-02-08 JIS Symbol 2 port Hexagon nut thick 6, across flats 27 EXH port (3 port only) 3 port Panel mounting hole 0.5 MPa supply 2-5.5 mounting hole 12 N F.O.F.

S070

Replacement Parts Plug connector assembly (for plug lead) Sub-plate Lead wire length S07014A Port size S070S M3 M3 M5 M3 female thread M5 female thread 150 mm 300 mm 600 mm 1000 mm Nil 3 6 10 Gasket Mounting screw Valve model S070A S070B S070M Gasket no. S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw no.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Low Differential Pressure Sensor

VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main circuit (Analog output) 1k Black OUT 12 to 24VDC + 12 to 24VDC + Load Blue LINE() Blue DC() Load Install the load either on the LINE (+) or LINE (-) side.

0.01

12 12 Bracket ZSE ISE Plug Rc, NPT, G 1/8 SUP port 24 Pressure gauge L3 6.5 ZSP 24 36 36 PS n Stations 1 Left Right ISA2 ISA2 Stations L1 L2 L3 1 46 2 84 38 3 122 38 76 4 160 76 114 5 198 114 152 6 236 152 190 PSE 63(Max. 65) IS 34 5 17 ISG Rc, NPT, G 1/8 (With HW, SW) M4 x 8 Detection port 19 For the bracket mounting position, refer to page 877.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

Multistage Ejector Series ZL112/212 1

Pmax Vacuum pressure P1 Qmax Q1 Suction flow rate 13-7-3 4 Multistage Ejector Series ZL112 How to Order ZL1 12 K1 12 25 5 M Z E With valve Without valve ZL1 1.2 mm 12 Nozzle diameter Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Lead wire length 0.5 m 2.9 m Nil

Suction Guard (Produced upon receipt of order) FHG Series

HOW 10 (1 1/4B) 12 (1 1/2B) 16 (2B) 45 20 (2 1/2B) 24 (3B) Fixed Note) Refer to page 509 for the T dimension. Replacement Element Part No.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11 2 4 1/8 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" 1/4 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 5/16" One-touch fitting for 3/8" 1/4 3/8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12

Rotary Table

Additionally, note that the 12 VDC relay does not apply to the auto switch. -12- 11. Pay attention to leakage current. <2-wire type> Current (leakage current) flows to the load to operate the internal circuit even when in the OFF state.

LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Valve in the inltial stage) Vibration resistance: No malfunction from test with 45 to 1000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF . (Value in the initial stage) Pilot Pressure Range Precautions Be sure to read before handling.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Basic Specifications Voltage 12 to 24 VDC 12 to 24 VDC No. of outputs for switch 2 outputs 5 outputs Analog output 1 to 5 V 4 to 20 mA Operating temperature 0 to 50C 0 to 50C Number of screens 3 3 Functions Front face: IP65 Others: IP40 Enclosure IP65 IP40 3 Step Yes Yes Wiring Connector Connector Compact Pneumatic Pressure Sensor PSE53m Compact Pneumatic Pressure Sensor PSE54m Low Differential

7.4

Voltage Symbol Type 5 24 VDC 6 12 VDC Note) For symbol, refer to page 741.