VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed Series (mm/s) 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-A02 0 1000 900 800 700 600 500 400 300 200 100 0 VQ7-6-FG-S-A02 Bore size Series MB Pressure

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

CE2

25 to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37

End Lock Cylinder Series CBG1

204 100 10 26 M26 x 1.5 23 100 1/2 21 130 40 204 4 End Lock Cylinder Series CBG1 With front lock: CBG1BN Bore size Stroke R GB (mm) Bore size (mm) DL1 GB S TB ZZ 20 19.5 10 (12) 80 (88) 11 117 (125) 25 19.5 10 (12) 80 (88) 11 122 (130) 32 20 10 (12) 81 (89) 10 (11) 123 (131) 40 19 10 (13) 87 (96) 10 (12) 139 (148) 50 23.5 12 (14) 102 (114) 12 (13) 162 (174) DL1 63 23.5 12 (14) 102 (114

Slider Type/Ball Bushing Bearing

, 200, 300 (N) 100, 200, 300, 400, 500 15 750 1 axis Operating pressure (MPa) Piston area (mm2) 100, 200, 300, 400, 500, 600 20 Bore size (mm) 1000 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500, 600, 800 25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm

Compact Guide Cylinder Series MGQ

221 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166 200 M8 x 1.25 11 11 12.5 15 18 21 16 17 17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25

Ionizer

V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

MONOSASHI-KUN WITH BRAKE CONTROLLER

NO 100 200 200 YES Whether cylinder speed is within speed level as shown in allowable kinetic energy graph. 100 Load(kgf) Load(kgf) 80 NO 100 100 80 63 63 50 YES 50 0 0 Whether loading is under specific load as shown in graph.

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Compact Vacuum Unit

ZB1-ZSF-A (ZSE10F) 14.5 to 14.5 psi (100 to 100 kPa) 15.2 to 15.2 psi (105 to 105 kPa) Model (Refer to the standard model number for the switch unit on page 9.)

Flow Control Equipment

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

240

or less 100 70 30 3 100 15 1 LEC 11.

Process Valve Series VNA

(mm) Symbol 3 2 1 Port size Rc 100 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note 2) Note) Note 2) 4 5 6 7 9 Other A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 24 VDC 12 VDC 7 Note 2) Valve size 1 to 4 Note 2) 240 VAC 50/60 Hz 11 15 11 10A 3 8 Note 2) B:

ZQ-OM01301

ZQ-OM01301-A 11.

Electric Actuator Miniature Rod Type Miniature Slide table Type

70 to 100 Maximum pushing force LEP 10 (Basic) 100 50 to 100 LEP 10L (Compact) 100 60 to 100 Parameter protect 1: Common + StepData Changeable parameter 1: Common + StepData, 2: Common Enable switch 2: Disable Select 1:Enable or 2:Disable when using a teaching box Model name Part no. of each product Only the English characters and numbers are changeable.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

Series VQ Metal Seal/Rubber Seal Body Ported

175 185.5 5 77.5 88 162.5 173 4 67 77.5 150 160.5 3 56.5 67 150 160.5 2 46 56.5 137.5 148 VQ4 25 35.5 112.5 123 L1 L2 L3 L4 VQZ Dimensions/Top entry connector [FU] (mm) VQD n L 1 100 110.5 16 15 250 260.5 14 237.5 248 13 237.5 248 12 225 235.5 11 212.5 223 10 200 210.5 9 187.5 198 8 175 185.5 7 162.5 173 6 162.5 173 5 150 160.5 4 137.5 148 3 125 135.5 2 112.5 123 L3 L4 100 110.5 VZS How

Hydraulic Cylinders

49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50