Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

o

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

o

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

VK3000

2 (A) 4 (B) 2 (A) 4 Flow Rate Characteristics/Weight 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R) Flow rate characteristics Operating pressure range (MPa) Weight (g) 4/2 5/3 (A/B R1/R2) Port size 1 4/2 (P A/B) Mounting with VK300 Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet VV061 The VK300 series can be mounted on the same manifold base VV5K3 of VK3000 series.

Electromagnetic Digital Flow Switch

(For details, refer to p. 15.)

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

Series CQ2

Bore size mm (in) Bore size Operating range Operating range l (mm) 180 200 15 (0.6) 15 (0.6) 9 Series CQ2 Compact Cylinder Solid State Auto Switches/Direct Mounting Type D-Y59 , D-Y69 , D-Y7P (V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch model no.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Symbol Position detector arms Switch bracket Positioning angle For the applicable auto switch model, refer to the table below. a b c d 10 11 12 13 14 15 20 23 25 180 X X X X X Data X X X X X X X 90 b d X Table position detector arm X X X X X X X a X Switch mounting bracket X X Cylinder Unit/Applicable Auto Switch Load voltage Lead wire length (m) Auto switch model Electrical entry Wiring

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

•

bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 ( n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !

Turntable Cylinder Series MGT

Nil Without auto switch Symbol Position detector arms Switch bracket Positioning angle c a b c d 10 11 12 13 14 15 20 23 25 180 Refer to the table below for auto switch part numbers. X X X X X X X X X X X X 90 X b d X X X Table position detector arm X X X X X X a Switch mounting bracket X Cylinder unit/Applicable auto switch types Load voltage Lead wire length (m) Auto switch part no.

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

KK/KK13

49.7 22 42.7 58.4 R 1/2 45.4 41.7 -04MS 53.4 13 71.7 85.5 R 3/8 59 53.7 KK6S-03MS 11 24 60.2 80.1 87.7 R 1/2 57.5 52.2 -04MS 65.5 31.2 1/2 13 27 81.6 110.9 R 3/4 56 50.7 -06MS 15 Reference dimension for R threads after installation.

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Transfer

CC 16 19 23 DD 12 15 16.5 EE 14.5 16 22 FF 63.5 77.5 95 GG 22 27 35 HH 24 32 37 II 16 19 23 F 93.5 Model ML2B25 ML2B32 ML2B40 107.5 130.5 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 OO 9 9.8 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 MA M5 x 0.8 M6 x 1 M8 x 1.25 LA 11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15 MC M5 x 0.8 M6 x 1 M8 x 1.25 LC 9.5 12 12 MD 9 11 14 LD

LEC-T1_C

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

AZ1000

(ASME B40.1 Grade B or better) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Brass Polycarbonate Brass Phosphor bronze B Case Window Socket Bourdon tube Material MPa MPA 1.14 (29) 2.28 (58) 2.1 (53.5) 2.12 (54) NPT 1/4 0.42 (10.5) inch (mm) 3) Part number of pressure gauge itself.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer