Rotary Table/Vane Style Series MSU

With auto switch: MDSUA1-S 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99/S99V/S9P/S9PV/T99/T99V CRB2 CRBU2 CRB1 MSU CRJ CRA1 12.5 37 28 CRQ2 MSQ MSZ Angle adjustment bolt CRQ2X MSQX MRQ 2 x M3 x 0.5 (Port location: Side ported type only) 24 1 A port B port 18.5 2 60 (69) 29 D-97/93A 15 1 30 D155 Series

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

RW 40 50 53.5 QW 40 60 57 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PA 40 60 100 PC 7.2 8.2 5.5 PG 4 6 9 PE 3.7 2.7 5 PD 2.8 6.6 8.5 PH 5.1 7.5 9.5 "P" indicates cylinder supply ports.

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

ZP

A5 M5 x 0.8 1 A6 M6 x 1 111 A8 M8 x 1 11 Male thread B4 M4 x 0.7 B5 M5 x 0.8 B6 M6 x 1 B8 M8 x 1.25 1 : ZPT/Vertical comes with a vacuum inlet (female thread).

Compact Cylinder with Air Cushion and Lock Series RLQ

33.5 Rod end nut 11 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/63 (Emergency Stop) Foot type/RLQL63 41 55 + Stroke 18 46 91.5 Special cap bolt 5 3.2 95 113 4-11 9 16.2 9 16.2 70 + Stroke 122.2 + Stroke Rod end nut 43.5 Front flange type/RLQF63 60 80 9 92 108 4-9 41 55 + Stroke 18 114 + Stroke Rod end nut 43.5 Rear flange/RLQG63 60 80 4-9 41 55 + Stroke 9 8 113 + Stroke

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 F F 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 0.5 MPa Gripping force (N) Gripping force (N) 0.5 MPa 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 70 90 0 10 30 50 70 90 Gripping point L (mm) Gripping point L (mm) 494 Series MHR2/MDHR2 Rotary Actuated

Modular Type Regulators Series AR

Refer to front matters 42 and 43 for Safety Instructions and pages 287 to 291 for Precautions on every series. 11 12 13 8 6 14 Mounting/Adjustment 7 Warning 15 1. Install the valve guide (on the opposite side of the handle) 60 mm away from the ground surface to facilitate maintenance inspection. 2.

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

Digital Flow Switch

3-Color Display Digital Flow Switch for Large Flow PF3A7 H Series IN Side Straight Section and Accuracy (Reference Data) PF3A703H (for 3000 L/min) PF3A706H (for 6000 L/min) PF3A712H (for 12000 L/min) 70% 70% 70% PFG300 Function Details PF3A7 H With 1/2" connected With 1" connected With 1 1/4" connected 60% 60% 60% Accuracy [%F.S.]

DOC1001322

Displays the run and stop status of the product. (4) Operating condition display P.5-11 (5) Compressor operating condition display Displays the run and stop status of the compressor. P.5-11 (6) Pump Operating condition display Displays the run and stop status of the pump.

CXWM/CXWL

Note 3) For 16, 20 and 25, strokes up to 275, and for 32, strokes up to 225 are 11 available as made-to-order. (-XB11) Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

/

NBR FKM Pressure range 0 to 7 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Y u Pilot valve o Electrical entry T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) W: M12 connector (4-pin type) Note 2) V: M12 connector (5-pin type) Note 3) DO: DIN terminal without connector Note 1) V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115 VAC] 50/60

HRX-OM-Z002

Refer to Table 5-11. Make a selection with the [] [] keys and press the [SEL] key to apply the setting.

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

VXP21/22/23

Solenoid Specifications Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 4.5 45 3.2 35 6 55 7.5 60 6 50 8 60 11 65 9.5 60 11.5 65 Note) The return voltage is 20% or more of the rated voltage for AC and 2% or more for DC. The allowable voltage fluctuation rate is 10% of the rated voltage value for both AC and DC.

2/3 Port Valve for Various

Solenoid Specifications Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 4.5 45 3.2 35 6 55 7.5 60 6 50 8 60 11 65 9.5 60 11.5 65 Note) The return voltage is 20% or more of the rated voltage for AC and 2% or more for DC. The allowable voltage fluctuation rate is 10% of the rated voltage value for both AC and DC.

VP300/500/700

override Rated voltage Nil Push type 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz B Locking type (Slotted) C Locking type (Manual) 110 to 120 VAC, 50/60 Hz 4 Surge voltage suppressor Option 220 VAC, 50/60 Hz Indicator light 24 VDC 12 VDC 5 6 Light/Surge voltage suppressor E EZ Nil None 7 240 VAC, 50/60 Hz With light/surge voltage suppressor (Type E, T, D, or Y only) 9 Other Z Option S With

LEF-OM002xx

/LECP1/LECPMJ/91 LES40 Horizontal Transfer LES40 Vertical Transfer B 60 60 B A 50 H 50 W(kg) A/H W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 LECPA V(mm/s) V(mm/s) LES40 Horizontal Transfer LES40 Vertical Transfer B 60 (2) Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Gripping point L (mm) Gripping point L (mm) 12-5-7 8 Series MHR2/MDHR2 Construction

Rotary Gripper Series MRHQ

MRHQ25 MRHQ25 -X 120 100 Pressure 0.2MPa Pressure 0.2MPa 100 MRHQ 80 Pressure 0.2MPa 0.2MPa Pressure 0.2MPa 80 Overhang H mm Overhang H mm MA 60 0.3MPa 0.3MPa 0.3MPa 0.7MPa 0.6MPa 0.5MPa 0.5MPa 0.7MPa 0.6MPa 0.5MPa 60 0.7MPa 0.7MPa 0.7MPa 0.3MPa 0.4MPa 0.3MPa 0.4MPa 0.4MPa 0.4MPa 0.4MPa 40 D0.5MPa 0.6MPa 0.5MPa 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point